Kentaro Yoshihara

Person

Koshi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Nozzle unit, liquid treatment apparatus, and liquid treatment method
- Patent number 12,072,625
- Issue date Aug 27, 2024
- Tokyo Electron Limited
- Takuya Miura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solution supply apparatus and solution supply method
- Patent number 11,433,420
- Issue date Sep 6, 2022
- Tokyo Electron Limited
- Ryouichirou Naitou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming method, storage medium, and film forming system
- Patent number 11,141,758
- Issue date Oct 12, 2021
- Tokyo Electron Limited
- Kentaro Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus and sto...
- Patent number 10,295,903
- Issue date May 21, 2019
- Tokyo Electron Limited
- Shinichi Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LIQUID TREATMENT METHOD AND STORAGE MEDIUM
- Publication number 20240361687
- Publication date Oct 31, 2024
- TOKYO ELECTRON LIMITED
- Takuya MIURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NOZZLE UNIT, LIQUID TREATMENT APPARATUS, AND LIQUID TREATMENT METHOD
- Publication number 20210333707
- Publication date Oct 28, 2021
- TOKYO ELECTRON LIMITED
- Takuya MIURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SOLUTION SUPPLY APPARATUS AND SOLUTION SUPPLY METHOD
- Publication number 20200290080
- Publication date Sep 17, 2020
- Tokyo Electron Limited
- Ryouichirou NAITOU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FILM FORMING METHOD, STORAGE MEDIUM, AND FILM FORMING SYSTEM
- Publication number 20180361428
- Publication date Dec 20, 2018
- TOKYO ELECTRON LIMITED
- Kentaro YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STO...
- Publication number 20180059539
- Publication date Mar 1, 2018
- TOKYO ELECTRON LIMITED
- Shinichi Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING METHOD AND COATING APPARATUS
- Publication number 20110312190
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Katsunori Ichino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE COATING METHOD AND SUBSTRATE COATING APPARATUS
- Publication number 20100151126
- Publication date Jun 17, 2010
- TOKYO ELECTRON LIMITED
- Tomohiro ISEKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST SOLUTION SUPPLY APPARATUS, RESIST SOLUTION SUPPLY METHOD, AN...
- Publication number 20090246397
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF TREATING SUBSTRATE AND COMPUTER STORAGE MEDIUM
- Publication number 20090181174
- Publication date Jul 16, 2009
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kentaro Yoshihara

Person

Patents Grantslast 30 patents

Nozzle unit, liquid treatment apparatus, and liquid treatment method

Solution supply apparatus and solution supply method

Film forming method, storage medium, and film forming system

Substrate processing method, substrate processing apparatus and sto...

Patents Applicationslast 30 patents

LIQUID TREATMENT METHOD AND STORAGE MEDIUM

NOZZLE UNIT, LIQUID TREATMENT APPARATUS, AND LIQUID TREATMENT METHOD

SOLUTION SUPPLY APPARATUS AND SOLUTION SUPPLY METHOD

FILM FORMING METHOD, STORAGE MEDIUM, AND FILM FORMING SYSTEM

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STO...

COATING METHOD AND COATING APPARATUS

SUBSTRATE COATING METHOD AND SUBSTRATE COATING APPARATUS

RESIST SOLUTION SUPPLY APPARATUS, RESIST SOLUTION SUPPLY METHOD, AN...

METHOD OF TREATING SUBSTRATE AND COMPUTER STORAGE MEDIUM