Kentarou SERA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thin film forming method, thin film forming apparatus, and program
- Patent number 8,642,486
- Issue date Feb 4, 2014
- Tokyo Electron Limited
- Toshiyuki Ikeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
THIN FILM FORMING APPARATUS AND COMPUTER-READABLE MEDIUM
- Publication number 20140090594
- Publication date Apr 3, 2014
- TOKYO ELECTRON LIMITED
- Toshiyuki IKEUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING METHOD, THIN FILM FORMING APPARATUS, AND PROGRAM
- Publication number 20120164847
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Toshiyuki IKEUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...