Kento Kurusu

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,482,428
- Issue date Oct 25, 2022
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus
- Patent number 10,643,865
- Issue date May 5, 2020
- Tokyo Electron Limited
- Yoshifumi Amano
- A46 - BRUSHWARE
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 10,290,518
- Issue date May 14, 2019
- Tokyo Electron Limited
- Kento Kurusu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate detection method of subst...
- Patent number 9,691,646
- Issue date Jun 27, 2017
- Tokyo Electron Limited
- Kento Kurusu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing scrubber, substrate processing apparatus and s...
- Patent number 9,238,256
- Issue date Jan 19, 2016
- Tokyo Electron Limited
- Kento Kurusu
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250010341
- Publication date Jan 9, 2025
- TOKYO ELECTRON LIMITED
- Takanori Obaru
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING MEMBER, SUBSTRATE PROCESSING APPARATUS AND SUBST...
- Publication number 20240139780
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Kento KURUSU
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200083064
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS
- Publication number 20170278728
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- A46 - BRUSHWARE
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20160064259
- Publication date Mar 3, 2016
- TOKYO ELECTRON LIMITED
- Kento KURUSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE DETECTION METHOD OF SUBST...
- Publication number 20150318194
- Publication date Nov 5, 2015
- TOKYO ELECTRON LIMITED
- Kento Kurusu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SCRUBBER, SUBSTRATE PROCESSING APPARATUS AND S...
- Publication number 20130206171
- Publication date Aug 15, 2013
- TOKYO ELECTRON LIMITED
- Kento Kurusu
- B08 - CLEANING

Kento Kurusu

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate cleaning apparatus

Substrate liquid processing apparatus

Substrate processing apparatus, substrate detection method of subst...

Substrate processing scrubber, substrate processing apparatus and s...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING MEMBER, SUBSTRATE PROCESSING APPARATUS AND SUBST...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE DETECTION METHOD OF SUBST...

SUBSTRATE PROCESSING SCRUBBER, SUBSTRATE PROCESSING APPARATUS AND S...