Kento SUZUKI

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Nirasaki City, JP

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Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20250183048
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250183043
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method and Etching Apparatus
- Publication number 20190221440
- Publication date Jul 18, 2019
- TOKYO ELECTRON LIMITED
- Yasuo ASADA
- B08 - CLEANING