Kento Tsukano

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, recording medium and substrate process...
- Patent number 11,133,176
- Issue date Sep 28, 2021
- Tokyo Electron Limited
- Kento Tsukano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning substrate processing apparatus and system of cle...
- Patent number 10,950,465
- Issue date Mar 16, 2021
- Tokyo Electron Limited
- Shotaro Kitayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,692,739
- Issue date Jun 23, 2020
- Tokyo Electron Limited
- Yosuke Kawabuchi
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,576,493
- Issue date Mar 3, 2020
- Tokyo Electron Limited
- Keisuke Egashira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,504,718
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and re...
- Patent number 10,395,950
- Issue date Aug 27, 2019
- Tokyo Electron Limited
- Gentaro Goshi
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200020550
- Publication date Jan 16, 2020
- TOKYO ELECTRON LIMITED
- Gentaro Goshi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...
- Publication number 20190051519
- Publication date Feb 14, 2019
- TOKYO ELECTRON LIMITED
- Kento Tsukano
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180264504
- Publication date Sep 20, 2018
- TOKYO ELECTRON LIMITED
- Keisuke Egashira
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180254200
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180254180
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Gentaro Goshi
- B08 - CLEANING
Information Patent Application
METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS AND SYSTEM OF CLE...
- Publication number 20180158699
- Publication date Jun 7, 2018
- TOKYO ELECTRON LIMITED
- Shotaro Kitayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20180138058
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Keisuke Egashira
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20180138035
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...
- Publication number 20180130675
- Publication date May 10, 2018
- TOKYO ELECTRON LIMITED
- Gentaro Goshi
- B08 - CLEANING

Kento Tsukano

Person

Patents Grantslast 30 patents

Substrate processing method, recording medium and substrate process...

Method of cleaning substrate processing apparatus and system of cle...

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, substrate processing method, and st...

Substrate processing apparatus, substrate processing method, and re...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS AND SYSTEM OF CLE...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...