Kenya Ito

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Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical polishing apparatus for polishing workpiece
- Patent number 11,446,784
- Issue date Sep 20, 2022
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Treatment device, plating apparatus including the same, conveying d...
- Patent number 11,396,714
- Issue date Jul 26, 2022
- Ebara Corporation
- Kenya Ito
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,192,147
- Issue date Dec 7, 2021
- Ebara Corporation
- Yu Ishii
- B08 - CLEANING
Information Patent Grant
Method and apparatus for polishing a substrate, and method for proc...
- Patent number 10,926,376
- Issue date Feb 23, 2021
- Ebara Corporation
- Masayuki Nakanishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method, polishing apparatus, and substrate processing system
- Patent number 10,854,473
- Issue date Dec 1, 2020
- Ebara Corporation
- Yu Ishii
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,799,917
- Issue date Oct 13, 2020
- Ebara Corporation
- Yu Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,403,505
- Issue date Sep 3, 2019
- Ebara Corporation
- Kenya Ito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,328,465
- Issue date Jun 25, 2019
- Ebara Corporation
- Yu Ishii
- B08 - CLEANING
Information Patent Grant
Pad holder for polishing apparatus
- Patent number D845568
- Issue date Apr 9, 2019
- Ebara Corporation
- Yu Ishii
- D32 - Washing, cleaning, or drying machine
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 10,155,294
- Issue date Dec 18, 2018
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate peripheral portion measuring device, and substrate periph...
- Patent number 10,134,614
- Issue date Nov 20, 2018
- Ebara Corporation
- Mitsuo Tada
- B24 - GRINDING POLISHING
Information Patent Grant
Abrasive film fabrication method and abrasive film
- Patent number 10,016,875
- Issue date Jul 10, 2018
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,914,196
- Issue date Mar 13, 2018
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad and chemical mechanical polishing apparatus for polis...
- Patent number 9,821,429
- Issue date Nov 21, 2017
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Method of polishing back surface of substrate and substrate process...
- Patent number 9,808,903
- Issue date Nov 7, 2017
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,808,836
- Issue date Nov 7, 2017
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Tape sticking apparatus and tape sticking method
- Patent number 9,738,483
- Issue date Aug 22, 2017
- Ebara Corporation
- Kenya Ito
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing apparatus
- Patent number 9,566,616
- Issue date Feb 14, 2017
- Ebara Corporation
- Tetsuji Togawa
- B08 - CLEANING
Information Patent Grant
Work holder for polishing apparatus
- Patent number D777546
- Issue date Jan 31, 2017
- Ebara Corporation
- Yu Ishii
- D08 - Tools and hardware
Information Patent Grant
Polishing method
- Patent number 9,492,910
- Issue date Nov 15, 2016
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Abrasive film fabrication method and abrasive film
- Patent number 9,393,595
- Issue date Jul 19, 2016
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,287,158
- Issue date Mar 15, 2016
- Ebara Corporation
- Tamami Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,248,545
- Issue date Feb 2, 2016
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus, polishing method and pressing member for press...
- Patent number 9,199,352
- Issue date Dec 1, 2015
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 8,748,289
- Issue date Jun 10, 2014
- Ebara Corporation
- Masayuki Nakanishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,641,480
- Issue date Feb 4, 2014
- Ebara Corporation
- Masayuki Nakanishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,506,362
- Issue date Aug 13, 2013
- Kabushiki Kaisha Toshiba
- Dai Fukushima
- B24 - GRINDING POLISHING
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 8,445,360
- Issue date May 21, 2013
- Ebara Corporation
- Masayuki Nakanishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 8,393,935
- Issue date Mar 12, 2013
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Control method for magnetic disk device, magnetic disk device, and...
- Patent number 8,049,986
- Issue date Nov 1, 2011
- Hitachi Global Storage Technologies Netherlands B.V.
- Kenya Ito
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DETERMINATION DEVICE, LEARNING DEVICE, DETERMINATION SYSTEM, DETERM...
- Publication number 20240159659
- Publication date May 16, 2024
- J-OIL MILLS, INC.
- Kenya ITO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TAPE STICKING SYSTEM, TAPE STICKING METHOD, TAPE PEELING SYSTEM, AN...
- Publication number 20230317501
- Publication date Oct 5, 2023
- EBARA CORPORATION
- Kenya ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT DEVICE, PLATING APPARATUS INCLUDING THE SAME, CONVEYING D...
- Publication number 20190376203
- Publication date Dec 12, 2019
- EBARA CORPORATION
- Kenya ITO
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190262870
- Publication date Aug 29, 2019
- EBARA CORPORATION
- Yu Ishii
- B08 - CLEANING
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLISHING WORKPIECE
- Publication number 20190262968
- Publication date Aug 29, 2019
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190262869
- Publication date Aug 29, 2019
- EBARA CORPORATION
- Yu Ishii
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE, AND METHOD FOR PROC...
- Publication number 20190054594
- Publication date Feb 21, 2019
- EBARA CORPORATION
- Masayuki NAKANISHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD, POLISHING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20180254196
- Publication date Sep 6, 2018
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20180169822
- Publication date Jun 21, 2018
- EBARA CORPORATION
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180076043
- Publication date Mar 15, 2018
- EBARA CORPORATION
- Kenya ITO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLISHING WORKPIECE
- Publication number 20170312880
- Publication date Nov 2, 2017
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
ABRASIVE FILM FABRICATION METHOD AND ABRASIVE FILM
- Publication number 20160318155
- Publication date Nov 3, 2016
- EBARA CORPORATION
- Yu ISHII
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160172221
- Publication date Jun 16, 2016
- EBARA CORPORATION
- Tamami TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING METHOD
- Publication number 20160052107
- Publication date Feb 25, 2016
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
TAPE STICKING APPARATUS AND TAPE STICKING METHOD
- Publication number 20160023861
- Publication date Jan 28, 2016
- EBARA CORPORATION
- Kenya ITO
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20150258653
- Publication date Sep 17, 2015
- EBARA CORPORATION
- Masaya Seki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PERIPHERAL PORTION MEASURING DEVICE, AND SUBSTRATE PERIPH...
- Publication number 20150101752
- Publication date Apr 16, 2015
- EBARA CORPORATION
- Mitsuo TADA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20150104999
- Publication date Apr 16, 2015
- EBARA CORPORATION
- Masaya SEKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150000055
- Publication date Jan 1, 2015
- EBARA CORPORATION
- Tetsuji TOGAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150000056
- Publication date Jan 1, 2015
- EBARA CORPORATION
- Tetsuji TOGAWA
- B08 - CLEANING
Information Patent Application
METHOD OF POLISHING BACK SURFACE OF SUBSTRATE AND SUBSTRATE PROCESS...
- Publication number 20140220866
- Publication date Aug 7, 2014
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
ABRASIVE FILM FABRICATION METHOD AND ABRASIVE FILM
- Publication number 20140030962
- Publication date Jan 30, 2014
- EBARA CORPORATION
- Yu ISHII
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
POLISHING PAD AND CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLIS...
- Publication number 20140004772
- Publication date Jan 2, 2014
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20130237033
- Publication date Sep 12, 2013
- EBARA CORPORATION
- Masayuki NAKANISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130213437
- Publication date Aug 22, 2013
- Kabushiki Kaisha Toshiba
- Yu Ishii
- B08 - CLEANING
Information Patent Application
POLISHING METHOD
- Publication number 20110256811
- Publication date Oct 20, 2011
- Masayuki NAKANISHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS, POLISHING METHOD AND PRESSING MEMBER FOR PRESS...
- Publication number 20110237164
- Publication date Sep 29, 2011
- Masaya SEKI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20110217906
- Publication date Sep 8, 2011
- Masayuki NAKANISHI
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20110207294
- Publication date Aug 25, 2011
- Masayuki NAKANISHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20110165825
- Publication date Jul 7, 2011
- Norio Kimura
- B24 - GRINDING POLISHING

Person

Patents Grantslast 30 patents

Chemical mechanical polishing apparatus for polishing workpiece

Treatment device, plating apparatus including the same, conveying d...

Substrate processing apparatus and substrate processing method

Method and apparatus for polishing a substrate, and method for proc...

Polishing method, polishing apparatus, and substrate processing system

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Pad holder for polishing apparatus

Polishing apparatus and polishing method

Substrate peripheral portion measuring device, and substrate periph...

Abrasive film fabrication method and abrasive film

Polishing apparatus and polishing method

Polishing pad and chemical mechanical polishing apparatus for polis...

Method of polishing back surface of substrate and substrate process...

Substrate processing apparatus

Tape sticking apparatus and tape sticking method

Substrate processing apparatus

Work holder for polishing apparatus

Polishing method

Abrasive film fabrication method and abrasive film

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Polishing apparatus, polishing method and pressing member for press...

Method for manufacturing semiconductor device

Polishing apparatus and polishing method

Polishing apparatus and polishing method

Method for manufacturing semiconductor device

Polishing apparatus

Control method for magnetic disk device, magnetic disk device, and...

Patents Applicationslast 30 patents

DETERMINATION DEVICE, LEARNING DEVICE, DETERMINATION SYSTEM, DETERM...

TAPE STICKING SYSTEM, TAPE STICKING METHOD, TAPE PEELING SYSTEM, AN...

TREATMENT DEVICE, PLATING APPARATUS INCLUDING THE SAME, CONVEYING D...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLISHING WORKPIECE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD AND APPARATUS FOR POLISHING A SUBSTRATE, AND METHOD FOR PROC...

POLISHING METHOD, POLISHING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM

POLISHING APPARATUS AND POLISHING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLISHING WORKPIECE

ABRASIVE FILM FABRICATION METHOD AND ABRASIVE FILM

SUBSTRATE PROCESSING APPARATUS

POLISHING METHOD

TAPE STICKING APPARATUS AND TAPE STICKING METHOD

POLISHING APPARATUS AND POLISHING METHOD

SUBSTRATE PERIPHERAL PORTION MEASURING DEVICE, AND SUBSTRATE PERIPH...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

METHOD OF POLISHING BACK SURFACE OF SUBSTRATE AND SUBSTRATE PROCESS...

ABRASIVE FILM FABRICATION METHOD AND ABRASIVE FILM

POLISHING PAD AND CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLIS...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

POLISHING METHOD

POLISHING APPARATUS, POLISHING METHOD AND PRESSING MEMBER FOR PRESS...

POLISHING APPARATUS AND POLISHING METHOD

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

POLISHING APPARATUS