Membership
Tour
Register
Log in
Keon-young Ko
Follow
Person
Suwon, KR
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Chemical-mechanical polishing apparatus and method
Patent number
6,336,846
Issue date
Jan 8, 2002
Samsung Electronics Co., Ltd.
Choul-gue Park
B24 - GRINDING POLISHING