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Keping Han
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Beverly, MA, US
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last 30 patents
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Patent Grant
Plasma mediated ashing processes that include formation of a protec...
Patent number
9,128,382
Issue date
Sep 8, 2015
Lam Research Corporation
Ivan Berry
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE FORMATION OF A PROTEC...
Publication number
20140103010
Publication date
Apr 17, 2014
LAM RESEARCH CORPORATION
Ivan Berry
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE FORMATION OF A PROTEC...
Publication number
20090277871
Publication date
Nov 12, 2009
Axcelis Technologies, Inc.
Ivan Berry
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY