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Hsin-Chu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for chemical mechanical polishing process control
Patent number
10,096,482
Issue date
Oct 9, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor fabrication component retuning
Patent number
9,323,244
Issue date
Apr 26, 2016
Taiwan Semiconductor Manufacturing Company Limited
Keung Hui
G05 - CONTROLLING REGULATING
Information
Patent Grant
Semiconductor processing dispatch control
Patent number
9,158,301
Issue date
Oct 13, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Sunny Wu
G05 - CONTROLLING REGULATING
Information
Patent Grant
Chemical mechanical polish process control for improvement in withi...
Patent number
9,132,523
Issue date
Sep 15, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Shen-Nan Lee
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for target thickness and surface profile unifo...
Patent number
9,102,033
Issue date
Aug 11, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
B24 - GRINDING POLISHING
Information
Patent Grant
System and method of dosage profile control
Patent number
8,925,479
Issue date
Jan 6, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor processing dispatch control
Patent number
8,781,614
Issue date
Jul 15, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Sunny Wu
G05 - CONTROLLING REGULATING
Information
Patent Grant
System and method of dosage profile control
Patent number
8,309,444
Issue date
Nov 13, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Scanning method and system using 2-D ion implanter
Patent number
8,294,124
Issue date
Oct 23, 2012
Taiwan Semiconductor Manufacturing Co., Ltd.
Keung Hui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing dispatch control
Patent number
8,295,965
Issue date
Oct 23, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Sunny Wu
G05 - CONTROLLING REGULATING
Information
Patent Grant
Chemical mechanical polish process control for improvement in withi...
Patent number
8,129,279
Issue date
Mar 6, 2012
Taiwan Semiconductor Manufacturing Co., Ltd.
Shen-Nan Lee
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Apparatus and Method for Chemical Mechanical Polishing Process Control
Publication number
20150348797
Publication date
Dec 3, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR FABRICATION COMPONENT RETUNING
Publication number
20150081081
Publication date
Mar 19, 2015
Taiwan Semiconductor Manufacturing Company Limited
Keung Hui
G05 - CONTROLLING REGULATING
Information
Patent Application
Semiconductor Processing Dispatch Control
Publication number
20140303765
Publication date
Oct 9, 2014
Sunny Wu
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
System and Method of Dosage Profile Control
Publication number
20130068162
Publication date
Mar 21, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor Processing Dispatch Control
Publication number
20130013097
Publication date
Jan 10, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Sunny Wu
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
Chemical Mechanical Polish Process Control for Improvement in Withi...
Publication number
20120164918
Publication date
Jun 28, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Shen-Nan Lee
B24 - GRINDING POLISHING
Information
Patent Application
APPARATUS AND METHOD FOR TARGET THICKNESS AND SURFACE PROFILE UNIFO...
Publication number
20120129431
Publication date
May 24, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
KEUNG HUI
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor Processing Dispatch Control
Publication number
20120016509
Publication date
Jan 19, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Sunny Wu
G05 - CONTROLLING REGULATING
Information
Patent Application
System and Method of Dosage Profile Control
Publication number
20120009692
Publication date
Jan 12, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SCANNING METHOD AND SYSTEM USING 2-D ION IIMPLANTER
Publication number
20110174991
Publication date
Jul 21, 2011
Taiwan Semiconductor Manufacturing Co., LTD
Keung HUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Chemical Mechanical Polish Process Control for Improvement in Withi...
Publication number
20100093259
Publication date
Apr 15, 2010
Shen-Nan Lee
B24 - GRINDING POLISHING