Keven A. Cline

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Polishing carrier head with a modified pressure profile
- Patent number 7,074,118
- Issue date Jul 11, 2006
- FREESCALE SEMICONDUCTOR, INC.
- Brian E. Bottema
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system having a carrier head with substrate presence sensing
- Patent number 6,905,392
- Issue date Jun 14, 2005
- FREESCALE SEMICONDUCTOR, INC.
- Brian E. Bottema
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Polishing system having a carrier head with substrate presence sensing
- Publication number 20040266324
- Publication date Dec 30, 2004
- Brian E. Bottema
- B24 - GRINDING POLISHING