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Kevin A. PAPKE
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Portland, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Protection of aluminum process chamber components
Patent number
11,810,766
Issue date
Nov 7, 2023
Applied Materials, Inc.
Karthikeyan Balaraman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for fabricating chamber parts
Patent number
11,591,689
Issue date
Feb 28, 2023
Applied Materials, Inc.
Mats Larsson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Protective layers for processing chamber components
Patent number
11,239,058
Issue date
Feb 1, 2022
Applied Materials, Inc.
Karthikeyan Balaraman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming a protective coating film for halide plasma resi...
Patent number
11,118,263
Issue date
Sep 14, 2021
Applied Materials, Inc.
Yogita Pareek
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Protective yttria coating for semiconductor equipment parts
Patent number
11,047,035
Issue date
Jun 29, 2021
Applied Materials, Inc.
Ramesh Gopalan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical conversion of yttria into yttrium fluoride and yttrium oxy...
Patent number
10,941,303
Issue date
Mar 9, 2021
Applied Materials, Inc.
Mats Larsson
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Chamber component part wear indicator and a system for detecting pa...
Patent number
10,921,251
Issue date
Feb 16, 2021
Applied Materials, Inc.
Mats Larsson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating tester using gas sensors
Patent number
10,883,972
Issue date
Jan 5, 2021
Applied Materials, Inc.
Tasnuva Tabassum
G01 - MEASURING TESTING
Information
Patent Grant
30 nm in-line LPC testing and cleaning of semiconductor processing...
Patent number
10,583,465
Issue date
Mar 10, 2020
Applied Materials, Inc.
Jianqi Wang
B08 - CLEANING
Information
Patent Grant
Method for forming yttrium oxide on semiconductor processing equipment
Patent number
10,253,406
Issue date
Apr 9, 2019
Applied Materials, Inc.
Laksheswar Kalita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Aluminum electroplating and oxide formation as barrier layer for al...
Patent number
10,233,554
Issue date
Mar 19, 2019
Applied Materials, Inc.
Yogita Pareek
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Oxidized showerhead and process kit parts and methods of using same
Patent number
9,914,999
Issue date
Mar 13, 2018
Applied Materials, Inc.
Muhammad M. Rasheed
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FABRICATING CHAMBER PARTS
Publication number
20230167543
Publication date
Jun 1, 2023
Applied Materials, Inc.
Mats LARSSON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROTECTIVE MULTILAYER COATING FOR PROCESSING CHAMBER COMPONENTS
Publication number
20220277936
Publication date
Sep 1, 2022
Applied Materials, Inc.
Geetika BAJAJ
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COATING FOR HALIDE PLASMA RESISTANCE
Publication number
20200354833
Publication date
Nov 12, 2020
Applied Materials, Inc.
Yogita PAREEK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FABRICATING CHAMBER PARTS
Publication number
20200270747
Publication date
Aug 27, 2020
Applied Materials, Inc.
Mats LARSSON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROTECTIVE LAYERS FOR PROCESSING CHAMBER COMPONENTS
Publication number
20200020511
Publication date
Jan 16, 2020
Applied Materials, Inc.
Karthikeyan BALARAMAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROTECTION OF ALUMINUM PROCESS CHAMBER COMPONENTS
Publication number
20200013589
Publication date
Jan 9, 2020
Applied Materials, Inc.
Karthikeyan BALARAMAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROTECTIVE YTTRIA COATING FOR SEMICONDUCTOR EQUIPMENT PARTS
Publication number
20190264314
Publication date
Aug 29, 2019
Ramesh Gopalan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IN-SITU REMOVAL OF ACCUMULATED PROCESS BYPRODUCTS FROM COMPONENTS O...
Publication number
20180330929
Publication date
Nov 15, 2018
Applied Materials, Inc.
Ranga Rao ARNEPALLI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COATING TESTER USING GAS SENSORS
Publication number
20180224412
Publication date
Aug 9, 2018
Applied Materials, Inc.
Tasnuva TABASSUM
G01 - MEASURING TESTING
Information
Patent Application
CHEMICAL CONVERSION OF YTTRIA INTO YTTRIUM FLUORIDE AND YTTRIUM OXY...
Publication number
20180105701
Publication date
Apr 19, 2018
Applied Materials, Inc.
Mats LARSSON
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD TO DEPOSIT ALUMINUM OXY-FLUORIDE LAYER FOR FAST RECOVERY OF...
Publication number
20180061617
Publication date
Mar 1, 2018
Applied Materials, Inc.
Jianqi WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHAMBER COMPONENT PART WEAR INDICATOR AND A SYSTEM FOR DETECTING PA...
Publication number
20180052104
Publication date
Feb 22, 2018
Applied Materials, Inc.
Mats LARSSON
G01 - MEASURING TESTING
Information
Patent Application
30 NM IN-LINE LPC TESTING AND CLEANING OF SEMICONDUCTOR PROCESSING...
Publication number
20170299487
Publication date
Oct 19, 2017
Applied Materials, Inc.
Jianqi WANG
B08 - CLEANING
Information
Patent Application
ALUMINUM ELECTROPLATING AND OXIDE FORMATION AS BARRIER LAYER FOR AL...
Publication number
20170260639
Publication date
Sep 14, 2017
Applied Materials, Inc.
Yogita PAREEK
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD FOR ELECTROCHEMICALLY GROWN YTTRIA OR YTTRIUM OXIDE ON SEMIC...
Publication number
20170260618
Publication date
Sep 14, 2017
Applied Materials, Inc.
Laksheswar KALITA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD FOR REMOVING ALUMINUM FLUORIDE CONTAMINATION FROM SEMICONDUC...
Publication number
20170056935
Publication date
Mar 2, 2017
Applied Materials, Inc.
Ramesh GOPALAN
B08 - CLEANING
Information
Patent Application
OXIDIZED SHOWERHEAD AND PROCESS KIT PARTS AND METHODS OF USING SAME
Publication number
20160319428
Publication date
Nov 3, 2016
Applied Materials, Inc.
Muhammad M. RASHEED
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REAL TIME LIQUID PARTICLE COUNTER (LPC) END POINT DETECTION SYSTEM
Publication number
20160056061
Publication date
Feb 25, 2016
QUANTUM GLOBAL TECHNOLOGIES LLC
Jiansheng Wang
B08 - CLEANING
Information
Patent Application
REAL TIME LIQUID PARTICLE COUNTER (LPC) END POINT DETECTION SYSTEM
Publication number
20120216833
Publication date
Aug 30, 2012
Applied Materials, Inc.
Jiansheng Wang
B08 - CLEANING