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Kevin Bertsch
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Gilbert, AZ, US
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Patents Grants
last 30 patents
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Patent Grant
Apparatus and method for cleaning and removing liquids from front a...
Patent number
8,261,758
Issue date
Sep 11, 2012
Novellus Systems, Inc.
Vishwas Hardikar
B08 - CLEANING
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Patent Grant
High throughput servo load cup with integrated wet chemistry delivery
Patent number
7,811,153
Issue date
Oct 12, 2010
Novellus Systems, Inc.
Rich Blank
B24 - GRINDING POLISHING
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Patent Grant
CMP apparatus and method
Patent number
7,229,339
Issue date
Jun 12, 2007
Novellus Systems, Inc.
John F. Stumpf
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
APPARATUSES AND TECHNIQUES FOR CLEANING A MULTI-STATION SEMICONDUCT...
Publication number
20250022696
Publication date
Jan 16, 2025
LAM RESEARCH CORPORATION
Xin Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for cleaning and removing liquids from front a...
Publication number
20080041423
Publication date
Feb 21, 2008
Novellus Systems, Inc.
Vishwas Hardikar
B08 - CLEANING
Information
Patent Application
CMP apparatus and method
Publication number
20060003671
Publication date
Jan 5, 2006
John F. Stumpf
B24 - GRINDING POLISHING