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Kevin Choi
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San Jose, CA, US
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last 30 patents
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Patent Grant
Using bias RF pulsing to effectively clean electrostatic chuck (ESC)
Patent number
10,410,845
Issue date
Sep 10, 2019
Applied Materials, Inc.
Kenny Linh Doan
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Smart multi-level RF pulsing methods
Patent number
9,872,373
Issue date
Jan 16, 2018
Applied Materials, Inc.
Daisuke Shimizu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
BARE STAINLESS STEEL CHARGING CONTACT THROUGH METAL INJECTION MOLDI...
Publication number
20250105575
Publication date
Mar 27, 2025
Meta Platforms Technologies, LLC
Jianer Bao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
USING BIAS RF PULSING TO EFFECTIVELY CLEAN ELECTROSTATIC CHUCK (ESC)
Publication number
20190157052
Publication date
May 23, 2019
Applied Materials, Inc.
Kenny Linh DOAN
B08 - CLEANING