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Kevin E. Heidrich
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Beaverton, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Effective cell approximation model for logic structures
Patent number
12,013,350
Issue date
Jun 18, 2024
Onto Innovation Inc.
Kevin Eduard Heidrich
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Interferometric characterization of surface topography
Patent number
10,488,184
Issue date
Nov 26, 2019
Nanometrics Incorporated
Kevin Eduard Heidrich
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Determining overlay error using an in-chip overlay target
Patent number
7,808,643
Issue date
Oct 5, 2010
Nanometrics Incorporated
Nigel P. Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MASK AND PROCEDURE FOR PROCESS PERFORMANCE DETECTION
Publication number
20240248045
Publication date
Jul 25, 2024
ONTO INNOVATION INC.
Kevin Eduard HEIDRICH
G01 - MEASURING TESTING
Information
Patent Application
EFFECTIVE CELL APPROXIMATION MODEL FOR LOGIC STRUCTURES
Publication number
20220357286
Publication date
Nov 10, 2022
ONTO INNOVATION INC.
Kevin Eduard HEIDRICH
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MULTI-LAYER CALIBRATION FOR EMPIRICAL OVERLAY MEASUREMENT
Publication number
20220326626
Publication date
Oct 13, 2022
ONTO INNOVATION INC.
Nigel P. SMITH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INTERFEROMETRIC CHARACTERIZATION OF SURFACE TOPOGRAPHY
Publication number
20170016715
Publication date
Jan 19, 2017
Nanometrics Incorporated
Kevin Eduard HEIDRICH
G01 - MEASURING TESTING
Information
Patent Application
Determining Overlay Error Using an In-chip Overlay Target
Publication number
20090116014
Publication date
May 7, 2009
Nanometrics Incorporated
Nigel P. Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Forming polysilicon structures
Publication number
20040075119
Publication date
Apr 22, 2004
Sanjay Natarajan
H01 - BASIC ELECTRIC ELEMENTS