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Kevin Fairbairn
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Partridge Green, GB
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last 30 patents
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Patent Grant
Shield assembly for semiconductor wafer supports
Patent number
5,476,520
Issue date
Dec 19, 1995
Applied Materials, Inc.
Peter R. Jaffe
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method and apparatus for preventing cross contamination of species...
Patent number
4,937,206
Issue date
Jun 26, 1990
Applied Materials, Inc.
Peter R. Jaffe
H01 - BASIC ELECTRIC ELEMENTS