Kevin Gu

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Dry development of resists
- Patent number 12,211,691
- Issue date Jan 28, 2025
- Lam Research Corporation
- Boris Volosskiy
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DRY DEVELOPMENT OF RESISTS
- Publication number 20250112045
- Publication date Apr 3, 2025
- LAM RESEARCH CORPORATION
- Boris Volosskiy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AQUEOUS ACID DEVELOPMENT OR TREATMENT OF ORGANOMETALLIC PHOTORESIST
- Publication number 20250053092
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Nizan Kenane
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FORMING PHOTO-SENSITIVE HYBRID FILMS
- Publication number 20230314946
- Publication date Oct 5, 2023
- LAM RESEARCH CORPORATION
- Eric Calvin Hansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL CHELATORS FOR DEVELOPMENT OF METAL-CONTAINING PHOTORESIST
- Publication number 20230266670
- Publication date Aug 24, 2023
- LAM RESEARCH CORPORATION
- Eric Calvin Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PRE-EXPOSURE PHOTORESIST CURING TO ENHANCE EUV LITHOGRAPHIC PERFORM...
- Publication number 20230185196
- Publication date Jun 15, 2023
- LAM RESEARCH CORPORATION
- Timothy William Weidman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE SURFACE MODIFICATION WITH HIGH EUV ABSORBERS FOR HIGH PER...
- Publication number 20220365434
- Publication date Nov 17, 2022
- LAM RESEARCH CORPORATION
- Katie Lynn Nardi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRY CHAMBER CLEAN OF PHOTORESIST FILMS
- Publication number 20220344136
- Publication date Oct 27, 2022
- LAM RESEARCH CORPORATION
- Daniel Peter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST WITH MULTIPLE PATTERNING RADIATION-ABSORBING ELEMENTS A...
- Publication number 20220342301
- Publication date Oct 27, 2022
- LAM RESEARCH CORPORATION
- Timothy William Weidman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR PHOTORESIST DRY DEPOSITION
- Publication number 20220308462
- Publication date Sep 29, 2022
- LAM RESEARCH CORPORATION
- Butch Berney
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BAKE STRATEGIES TO ENHANCE LITHOGRAPHIC PERFORMANCE OF METAL-CONTAI...
- Publication number 20220308454
- Publication date Sep 29, 2022
- LAM RESEARCH CORPORATION
- Timothy William Weidman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIVE TONE DEVELOPMENT OF CVD EUV RESIST FILMS
- Publication number 20220299877
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Timothy William Weidman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRY DEVELOPMENT OF RESISTS
- Publication number 20220020584
- Publication date Jan 20, 2022
- LAM RESEARCH CORPORATION
- Boris Volosskiy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Dry development of resists

Patents Applicationslast 30 patents

DRY DEVELOPMENT OF RESISTS

AQUEOUS ACID DEVELOPMENT OR TREATMENT OF ORGANOMETALLIC PHOTORESIST

METHOD OF FORMING PHOTO-SENSITIVE HYBRID FILMS

METAL CHELATORS FOR DEVELOPMENT OF METAL-CONTAINING PHOTORESIST

PRE-EXPOSURE PHOTORESIST CURING TO ENHANCE EUV LITHOGRAPHIC PERFORM...

SUBSTRATE SURFACE MODIFICATION WITH HIGH EUV ABSORBERS FOR HIGH PER...

DRY CHAMBER CLEAN OF PHOTORESIST FILMS

PHOTORESIST WITH MULTIPLE PATTERNING RADIATION-ABSORBING ELEMENTS A...

APPARATUS FOR PHOTORESIST DRY DEPOSITION

BAKE STRATEGIES TO ENHANCE LITHOGRAPHIC PERFORMANCE OF METAL-CONTAI...

POSITIVE TONE DEVELOPMENT OF CVD EUV RESIST FILMS

DRY DEVELOPMENT OF RESISTS