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Kevin J. Dempsey
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Somerville, MA, US
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last 30 patents
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Patent Grant
Internal gettering in SIMOX SOI silicon substrates
Patent number
7,294,561
Issue date
Nov 13, 2007
Ibis Technology Corporation
Yuri Erokhin
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Internal gettering in SIMOX SOI silicon substrates
Publication number
20050037596
Publication date
Feb 17, 2005
Yuri Erokhin
H01 - BASIC ELECTRIC ELEMENTS