Kevin L. Siefering

Person

Chaska, MN, US

People

Patents Grantslast 30 patents

Information Patent Grant
Pressure control strategies to provide uniform treatment streams in...
- Patent number 11,707,770
- Issue date Jul 25, 2023
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Kevin Siefering
- B08 - CLEANING
Information Patent Grant
Treatment systems with repositionable nozzle useful in the manufact...
- Patent number 11,309,178
- Issue date Apr 19, 2022
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Kevin L. Siefering
- B08 - CLEANING
Information Patent Grant
Pressure control strategies to provide uniform treatment streams in...
- Patent number 11,241,720
- Issue date Feb 8, 2022
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Kevin Siefering
- B08 - CLEANING
Information Patent Grant
Processing system and method for providing a heated etching solution
- Patent number 9,911,631
- Issue date Mar 6, 2018
- Tel FSI, Inc.
- Kevin L Siefering
- G05 - CONTROLLING REGULATING
Information Patent Grant
Processing system and method for providing a heated etching solution
- Patent number 9,831,107
- Issue date Nov 28, 2017
- Tel FSI, Inc.
- Kevin L Siefering
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of substrate temperature control during high temperature wet...
- Patent number 9,490,138
- Issue date Nov 8, 2016
- Tel FSI, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using separate wafer contacts during wafer processing
- Patent number 9,412,639
- Issue date Aug 9, 2016
- Tel FSI, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Advanced process control for low variation treatment in immersion p...
- Patent number 7,312,161
- Issue date Dec 25, 2007
- FSI International, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for surface conditioning
- Patent number 7,025,831
- Issue date Apr 11, 2006
- FSI International, Inc.
- Jeffery W. Butterbaugh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Edge gripping device for handling a set of semiconductor wafers in...
- Patent number 6,845,779
- Issue date Jan 25, 2005
- FSI International, Inc.
- Tim W. Herbst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus for microelectronic devices in which polymeric...
- Patent number 6,284,006
- Issue date Sep 4, 2001
- FSI International, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for transferring a microelectronic device to and from a proc...
- Patent number 6,251,195
- Issue date Jun 26, 2001
- FSI International, Inc.
- Thomas J. Wagener
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combined process chamber with multi-positionable pedestal
- Patent number 6,221,781
- Issue date Apr 24, 2001
- FSI International, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for surface conditioning
- Patent number 6,015,503
- Issue date Jan 18, 2000
- FSI International, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Grant
Rotatable and translatable spray nozzle
- Patent number 5,942,037
- Issue date Aug 24, 1999
- FSI International, Inc.
- Thomas J. Wagener
- B24 - GRINDING POLISHING
Information Patent Grant
Aerodynamic aerosol chamber
- Patent number 5,810,942
- Issue date Sep 22, 1998
- FSI International, Inc.
- Natraj Narayanswami
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SCANNING APPARATUS WITH PENDULUM AND ROTATABLE SUBSTRATE...
- Publication number 20240290619
- Publication date Aug 29, 2024
- TEL Manufacturing and Engineering of America, Inc.
- Kevin Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radiatively-Cooled Substrate Holder
- Publication number 20230420274
- Publication date Dec 28, 2023
- TEL Manufacturing and Engineering of America, Inc.
- Kevin Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SCANNING APPARATUS WITH PENDULUM AND ROTATABLE SUBSTRATE...
- Publication number 20230021625
- Publication date Jan 26, 2023
- TEL Manufacturing and Engineering of America, Inc.
- Kevin Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pressure Control Strategies to Provide Uniform Treatment Streams in...
- Publication number 20220152659
- Publication date May 19, 2022
- TEL Manufacturing and Engineering of America, Inc.
- Kevin Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT SYSTEMS WITH REPOSITIONABLE NOZZLE USEFUL IN THE MANUFACT...
- Publication number 20200161124
- Publication date May 21, 2020
- TEL FSI, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-AWARE AND CORRECTING HETEROGENOUS PLATFORM INCORPORATING INTEG...
- Publication number 20200043764
- Publication date Feb 6, 2020
- TOKYO ELECTRON LIMITED
- Robert Clark
- G05 - CONTROLLING REGULATING
Information Patent Application
SELF-AWARE AND CORRECTING HETEROGENOUS PLATFORM INCORPORATING INTEG...
- Publication number 20200006100
- Publication date Jan 2, 2020
- TOKYO ELECTRON LIMITED
- Robert Clark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pressure Control Strategies to Provide Uniform Treatment Streams in...
- Publication number 20190291144
- Publication date Sep 26, 2019
- TEL FSI, Inc.
- Kevin Siefering
- B08 - CLEANING
Information Patent Application
METHOD OF USING SEPARATE WAFER CONTACTS DURING WAFER PROCESSING
- Publication number 20150162207
- Publication date Jun 11, 2015
- TEL FSI, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SUBSTRATE TEMPERATURE CONTROL DURING HIGH TEMPERATURE WET...
- Publication number 20150162211
- Publication date Jun 11, 2015
- TEL FSI, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER CLEANING WHEN USING ACID CHEMISTRIES TO FABRICATE MICROELEC...
- Publication number 20150128993
- Publication date May 14, 2015
- TEF FSI, Inc.
- Erik R. Berg
- B08 - CLEANING
Information Patent Application
Processing System and Method for Providing a Heated Etching Solution
- Publication number 20140277682
- Publication date Sep 18, 2014
- TEL FSI, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing System and Method for Providing a Heated Etching Solution
- Publication number 20140264153
- Publication date Sep 18, 2014
- TEL FSI, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED PROCESS CONTROL FOR LOW VARIATION TREATMENT IN IMMERSION P...
- Publication number 20070257011
- Publication date Nov 8, 2007
- FSI International, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor wafer cleaning systems and methods
- Publication number 20030098047
- Publication date May 29, 2003
- Tim W. Herbst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Advanced process control for immersion processing
- Publication number 20030094196
- Publication date May 22, 2003
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for material removal from an in-process microelectronic subs...
- Publication number 20020160606
- Publication date Oct 31, 2002
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS

Kevin L. Siefering

Person

Patents Grantslast 30 patents

Pressure control strategies to provide uniform treatment streams in...

Treatment systems with repositionable nozzle useful in the manufact...

Pressure control strategies to provide uniform treatment streams in...

Processing system and method for providing a heated etching solution

Processing system and method for providing a heated etching solution

Method of substrate temperature control during high temperature wet...

Method of using separate wafer contacts during wafer processing

Advanced process control for low variation treatment in immersion p...

Apparatus for surface conditioning

Edge gripping device for handling a set of semiconductor wafers in...

Processing apparatus for microelectronic devices in which polymeric...

Method for transferring a microelectronic device to and from a proc...

Combined process chamber with multi-positionable pedestal

Method and apparatus for surface conditioning

Rotatable and translatable spray nozzle

Aerodynamic aerosol chamber

Patents Applicationslast 30 patents

SUBSTRATE SCANNING APPARATUS WITH PENDULUM AND ROTATABLE SUBSTRATE...

Radiatively-Cooled Substrate Holder

SUBSTRATE SCANNING APPARATUS WITH PENDULUM AND ROTATABLE SUBSTRATE...

Pressure Control Strategies to Provide Uniform Treatment Streams in...

TREATMENT SYSTEMS WITH REPOSITIONABLE NOZZLE USEFUL IN THE MANUFACT...

SELF-AWARE AND CORRECTING HETEROGENOUS PLATFORM INCORPORATING INTEG...

SELF-AWARE AND CORRECTING HETEROGENOUS PLATFORM INCORPORATING INTEG...

Pressure Control Strategies to Provide Uniform Treatment Streams in...

METHOD OF USING SEPARATE WAFER CONTACTS DURING WAFER PROCESSING

METHOD OF SUBSTRATE TEMPERATURE CONTROL DURING HIGH TEMPERATURE WET...

CHAMBER CLEANING WHEN USING ACID CHEMISTRIES TO FABRICATE MICROELEC...

Processing System and Method for Providing a Heated Etching Solution

Processing System and Method for Providing a Heated Etching Solution

ADVANCED PROCESS CONTROL FOR LOW VARIATION TREATMENT IN IMMERSION P...

Semiconductor wafer cleaning systems and methods

Advanced process control for immersion processing

Method for material removal from an in-process microelectronic subs...