Kevin Lai

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San Jose, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
MODIFICATION OF METAL-CONTAINING SURFACES IN HIGH ASPECT RATIO PLAS...
- Publication number 20240420963
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- He Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATE RF PULSING IN CYCLING RECIPES TO REDUCE CHARGING INDUCE...
- Publication number 20240242935
- Publication date Jul 18, 2024
- LAM RESEARCH CORPORATION
- He Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROFILE TWISTING CONTROL IN DIELECTRIC ETCH
- Publication number 20240105432
- Publication date Mar 28, 2024
- LAM RESEARCH CORPORATION
- Neil Macaraeg Mackie
- H01 - BASIC ELECTRIC ELEMENTS