Kevin Madrigal

Person

Santa Cruz, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Configurable liquid precursor vaporizer
- Patent number 10,107,490
- Issue date Oct 23, 2018
- Lam Research Corporation
- Colin F. Smith
- F22 - STEAM GENERATION
Information Patent Grant
Internally heated porous filter for defect reduction with liquid or...
- Patent number 9,863,041
- Issue date Jan 9, 2018
- Lam Research Corporation
- Colin F. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual-plenum showerhead with interleaved plenum sub-volumes
- Patent number 9,728,380
- Issue date Aug 8, 2017
- Novellus Systems, Inc.
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and apparatus for flowable deposition in semiconductor fabri...
- Patent number 9,719,169
- Issue date Aug 1, 2017
- Novellus Systems, Inc.
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for improving wafer uniformity
- Patent number 9,284,644
- Issue date Mar 15, 2016
- Lam Research Corporation
- Kevin Madrigal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Variable showerhead flow by varying internal baffle conductance
- Patent number 9,121,097
- Issue date Sep 1, 2015
- Novellus Systems, Inc.
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
AMMONIA ABATEMENT FOR IMPROVED ROUGHING PUMP PERFORMANCE
- Publication number 20230034561
- Publication date Feb 2, 2023
- LAM RESEARCH CORPORATION
- Gishun Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERNALLY HEATED POROUS FILTER FOR DEFECT REDUCTION WITH LIQUID OR...
- Publication number 20160102398
- Publication date Apr 14, 2016
- LAM RESEARCH CORPORATION
- Colin F. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VARIABLE SHOWERHEAD FLOW BY VARYING INTERNAL BAFFLE CONDUCTANCE
- Publication number 20160020074
- Publication date Jan 21, 2016
- Novellus Systems, Inc.
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFIGURABLE LIQUID PRECURSOR VAPORIZER
- Publication number 20150377481
- Publication date Dec 31, 2015
- LAM RESEARCH CORPORATION
- Colin F. Smith
- F22 - STEAM GENERATION
Information Patent Application
APPARATUS AND METHOD FOR IMPROVING WAFER UNIFORMITY
- Publication number 20150240361
- Publication date Aug 27, 2015
- LAM RESEARCH CORPORATION
- Kevin Madrigal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VARIABLE SHOWERHEAD FLOW BY VARYING INTERNAL BAFFLE CONDUCTANCE
- Publication number 20140061324
- Publication date Mar 6, 2014
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND APPARATUS FOR FLOWABLE DEPOSITION IN SEMICONDUCTOR FABRI...
- Publication number 20120161405
- Publication date Jun 28, 2012
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kevin Madrigal

Person

Patents Grantslast 30 patents

Configurable liquid precursor vaporizer

Internally heated porous filter for defect reduction with liquid or...

Dual-plenum showerhead with interleaved plenum sub-volumes

System and apparatus for flowable deposition in semiconductor fabri...

Apparatus and method for improving wafer uniformity

Variable showerhead flow by varying internal baffle conductance

Patents Applicationslast 30 patents

AMMONIA ABATEMENT FOR IMPROVED ROUGHING PUMP PERFORMANCE

INTERNALLY HEATED POROUS FILTER FOR DEFECT REDUCTION WITH LIQUID OR...

VARIABLE SHOWERHEAD FLOW BY VARYING INTERNAL BAFFLE CONDUCTANCE

CONFIGURABLE LIQUID PRECURSOR VAPORIZER

APPARATUS AND METHOD FOR IMPROVING WAFER UNIFORMITY

VARIABLE SHOWERHEAD FLOW BY VARYING INTERNAL BAFFLE CONDUCTANCE

SYSTEM AND APPARATUS FOR FLOWABLE DEPOSITION IN SEMICONDUCTOR FABRI...