Kevin Michael Daniels

Person

Wakefield, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate halo arrangement for improved process uniformity
- Patent number 12,106,943
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Jay R. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and system including high angle extraction optics
- Patent number 11,948,781
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Christopher Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable extraction assembly for wide angle ion beam
- Patent number 11,495,430
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Jay R. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and system including high angle extraction optics
- Patent number 11,361,935
- Issue date Jun 14, 2022
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency extraction system for charge neutralized ion beam
- Patent number 10,224,181
- Issue date Mar 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection system for ion beam device
- Patent number 10,062,548
- Issue date Aug 28, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Jay Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for processing a substrate
- Patent number 9,863,032
- Issue date Jan 9, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma potential modulated ion implantation system
- Patent number 9,297,063
- Issue date Mar 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and method of treating a substrate
- Patent number 9,287,085
- Issue date Mar 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Ernest E. Allen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Technique for processing a substrate
- Patent number 9,093,372
- Issue date Jul 28, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for processing a substrate
- Patent number 9,076,914
- Issue date Jul 7, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Technique for processing a substrate
- Patent number 9,064,795
- Issue date Jun 23, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for processing a substrate using a mask
- Patent number 9,006,688
- Issue date Apr 14, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for processing a substrate
- Patent number 9,000,446
- Issue date Apr 7, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Benjamin B. Riordon
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus and method for controllably implanting workpieces
- Patent number 8,937,004
- Issue date Jan 20, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Techniques for processing a substrate
- Patent number 8,900,982
- Issue date Dec 2, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for in-situ monitoring of cathode erosion and pre...
- Patent number 8,756,021
- Issue date Jun 17, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deceleration lens
- Patent number 8,481,960
- Issue date Jul 9, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for ion implantation with dual purpose mask
- Patent number 8,461,558
- Issue date Jun 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controllably implanting workpieces
- Patent number 8,461,030
- Issue date Jun 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Integrated shadow mask/carrier for patterned ion implantation
- Patent number 8,216,923
- Issue date Jul 10, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Technique for manufacturing a solar cell
- Patent number 7,816,239
- Issue date Oct 19, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holding robot end effecter vertical position determination in...
- Patent number 7,675,048
- Issue date Mar 9, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Brant S. Binns
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION EXTRACTION OPTICS FOR ION PROCESSING SYSTEM
- Publication number 20250232942
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Costel BILOIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION EXTRACTION OPTICS HAVING NOVEL BLOCKER CONFIGURATION
- Publication number 20240194438
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA APPARATUS WITH NOVEL FARADAY SHIELD
- Publication number 20240128052
- Publication date Apr 18, 2024
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FASTENING ASSEMBLY FOR BEAM BLOCKER IN ION PROCESSING APPARATUS
- Publication number 20230197422
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Kevin T. Ryan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY
- Publication number 20220384156
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Jay R. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM INCLUDING HIGH ANGLE EXTRACTION OPTICS
- Publication number 20220148843
- Publication date May 12, 2022
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE EXTRACTION ASSEMBLY FOR WIDE ANGLE ION BEAM
- Publication number 20220020557
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Jay R. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM INCLUDING HIGH ANGLE EXTRACTION OPTICS
- Publication number 20210391155
- Publication date Dec 16, 2021
- Applied Materials, Inc.
- Christopher Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY
- Publication number 20190272983
- Publication date Sep 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Jay Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIO FREQUENCY EXTRACTION SYSTEM FOR CHARGE NEUTRALIZED ION BEAM
- Publication number 20170309453
- Publication date Oct 26, 2017
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS INJECTION SYSTEM FOR ION BEAM DEVICE
- Publication number 20170062185
- Publication date Mar 2, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Jay Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND METHOD OF TREATING A SUBSTRATE
- Publication number 20150325405
- Publication date Nov 12, 2015
- Ernest E. Allen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Technique For Processing A Substrate
- Publication number 20150179455
- Publication date Jun 25, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Techniques For Processing A Substrate
- Publication number 20150102237
- Publication date Apr 16, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reducing Glitching In An Ion Implanter
- Publication number 20140127394
- Publication date May 8, 2014
- George M. Gammel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Potential Modulated ION Implantation System
- Publication number 20130287964
- Publication date Oct 31, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUE FOR PROCESSING A SUBSTRATE
- Publication number 20130260544
- Publication date Oct 3, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUE FOR PROCESSING A SUBSTRATE
- Publication number 20130260543
- Publication date Oct 3, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES
- Publication number 20130234034
- Publication date Sep 12, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SYSTEM AND METHOD FOR ION IMPLANTATION WITH DUAL PURPOSE MASK
- Publication number 20130001440
- Publication date Jan 3, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SHADOW MASK/CARRIER FOR PATTERN ION IMPLANTATION
- Publication number 20120244692
- Publication date Sep 27, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD AND SYSTEM FOR IN-SITU MONITORING OF CATHODE ERSOSION AND PR...
- Publication number 20120101742
- Publication date Apr 26, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Shadow Mask/Carrier for Pattern Ion Implantation
- Publication number 20120083102
- Publication date Apr 5, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
PLATEN CLEANING
- Publication number 20120017938
- Publication date Jan 26, 2012
- Varian Semiconductor Equipment Associates, Inc.
- William T. Weaver
- B08 - CLEANING
Information Patent Application
DECELERATION LENS
- Publication number 20120001087
- Publication date Jan 5, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES
- Publication number 20110124186
- Publication date May 26, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
TECHNIQUES FOR PROCESSING A SUBSTRATE
- Publication number 20110092059
- Publication date Apr 21, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR PROCESSING A SUBSTRATE
- Publication number 20110089342
- Publication date Apr 21, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PROCESSING A SUBSTRATE
- Publication number 20110089343
- Publication date Apr 21, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
WORKPIECE HANDLING SYSTEM
- Publication number 20110027463
- Publication date Feb 3, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Benjamin B. Riordon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kevin Michael Daniels

Person

Patents Grantslast 30 patents

Substrate halo arrangement for improved process uniformity

Apparatus and system including high angle extraction optics

Tunable extraction assembly for wide angle ion beam

Apparatus and system including high angle extraction optics

Radio frequency extraction system for charge neutralized ion beam

Gas injection system for ion beam device

Techniques for processing a substrate

Plasma potential modulated ion implantation system

Processing apparatus and method of treating a substrate

Technique for processing a substrate

Techniques for processing a substrate

Technique for processing a substrate

Techniques for processing a substrate using a mask

Techniques for processing a substrate

Apparatus and method for controllably implanting workpieces

Techniques for processing a substrate

Method and system for in-situ monitoring of cathode erosion and pre...

Deceleration lens

System and method for ion implantation with dual purpose mask

Apparatus and method for controllably implanting workpieces

Integrated shadow mask/carrier for patterned ion implantation

Technique for manufacturing a solar cell

Wafer holding robot end effecter vertical position determination in...

Patents Applicationslast 30 patents

ION EXTRACTION OPTICS FOR ION PROCESSING SYSTEM

ION EXTRACTION OPTICS HAVING NOVEL BLOCKER CONFIGURATION

INDUCTIVELY COUPLED PLASMA APPARATUS WITH NOVEL FARADAY SHIELD

FASTENING ASSEMBLY FOR BEAM BLOCKER IN ION PROCESSING APPARATUS

SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY

APPARATUS AND SYSTEM INCLUDING HIGH ANGLE EXTRACTION OPTICS

TUNABLE EXTRACTION ASSEMBLY FOR WIDE ANGLE ION BEAM

APPARATUS AND SYSTEM INCLUDING HIGH ANGLE EXTRACTION OPTICS

SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY

RADIO FREQUENCY EXTRACTION SYSTEM FOR CHARGE NEUTRALIZED ION BEAM

GAS INJECTION SYSTEM FOR ION BEAM DEVICE

PROCESSING APPARATUS AND METHOD OF TREATING A SUBSTRATE

Technique For Processing A Substrate

Techniques For Processing A Substrate

Reducing Glitching In An Ion Implanter

Plasma Potential Modulated ION Implantation System

TECHNIQUE FOR PROCESSING A SUBSTRATE

TECHNIQUE FOR PROCESSING A SUBSTRATE

APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES

SYSTEM AND METHOD FOR ION IMPLANTATION WITH DUAL PURPOSE MASK

INTEGRATED SHADOW MASK/CARRIER FOR PATTERN ION IMPLANTATION

METHOD AND SYSTEM FOR IN-SITU MONITORING OF CATHODE ERSOSION AND PR...

Integrated Shadow Mask/Carrier for Pattern Ion Implantation

PLATEN CLEANING

DECELERATION LENS

APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES

TECHNIQUES FOR PROCESSING A SUBSTRATE

TECHNIQUES FOR PROCESSING A SUBSTRATE

TECHNIQUES FOR PROCESSING A SUBSTRATE

WORKPIECE HANDLING SYSTEM