Kevin Monahan

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Secure intra-chip hardware micro-segmentation using charged particl...
- Patent number 11,063,756
- Issue date Jul 13, 2021
- Kevin M. Monahan
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Precision substrate material multi-processing using miniature-colum...
- Patent number 11,037,756
- Issue date Jun 15, 2021
- David K. Lam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision substrate material multi-processing using miniature-colum...
- Patent number 10,734,192
- Issue date Aug 4, 2020
- David K. Lam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision substrate material multi-processing using miniature-colum...
- Patent number 10,658,153
- Issue date May 19, 2020
- David K. Lam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Secure permanent integrated circuit personalization
- Patent number 10,659,229
- Issue date May 19, 2020
- Michael C. Smayling
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
- Patent number 10,607,845
- Issue date Mar 31, 2020
- Kevin M. Monahan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Secure intra-chip hardware micro-segmentation using charged particl...
- Patent number 10,523,433
- Issue date Dec 31, 2019
- Kevin M. Monahan
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Secure permanent integrated circuit personalization
- Patent number 10,341,108
- Issue date Jul 2, 2019
- Michael C. Smayling
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Alignment and registration targets for charged particle beam substr...
- Patent number 10,026,589
- Issue date Jul 17, 2018
- Kevin M. Monahan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment and registration targets for charged particle beam substr...
- Patent number 10,020,166
- Issue date Jul 10, 2018
- Kevin M. Monahan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
- Patent number 10,020,200
- Issue date Jul 10, 2018
- Kevin M. Monahan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision substrate material multi-processing using miniature-colum...
- Patent number 9,881,817
- Issue date Jan 30, 2018
- David K. Lam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision material modification using miniature-column charged part...
- Patent number 9,822,443
- Issue date Nov 21, 2017
- Michael C. Smayling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precision material modification using miniature-column charged part...
- Patent number 9,824,859
- Issue date Nov 21, 2017
- Michael C. Smayling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision substrate material removal using miniature-column charged...
- Patent number 9,673,114
- Issue date Jun 6, 2017
- Multibeam Corporation
- David K. Lam
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Charged particle beam substrate inspection using both vector and ra...
- Patent number 9,620,332
- Issue date Apr 11, 2017
- Multibeam Corporation
- David K. Lam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment and registration targets for multiple-column charged part...
- Patent number 9,595,419
- Issue date Mar 14, 2017
- Multibeam Corporation
- Kevin M. Monahan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,556,521
- Issue date Jan 31, 2017
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alignment and registration targets for multiple-column charged part...
- Patent number 9,478,395
- Issue date Oct 25, 2016
- Multibeam Corporation
- Kevin M. Monahan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam substrate inspection using both vector and ra...
- Patent number 9,466,463
- Issue date Oct 11, 2016
- Multibeam Corporation
- David K. Lam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision substrate material removal using miniature-column charged...
- Patent number 9,466,464
- Issue date Oct 11, 2016
- Multibeam Corporation
- David K. Lam
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,453,281
- Issue date Sep 27, 2016
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automatic optimization of etch process for accelerated yield ramp w...
- Patent number 9,207,539
- Issue date Dec 8, 2015
- Multibeam Corporation
- David K. Lam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Matched multiple charged particle beam systems for lithographic pat...
- Patent number 9,184,027
- Issue date Nov 10, 2015
- Multibeam Corporation
- David K. Lam
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Matched multiple charged particle beam systems for lithographic pat...
- Patent number 8,999,627
- Issue date Apr 7, 2015
- Multibeam Corporation
- David K. Lam
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automatic optimization of etch process for accelerated yield ramp w...
- Patent number 8,999,628
- Issue date Apr 7, 2015
- Multibeam Corporation
- David K. Lam
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Test structures and methods for monitoring or controlling a semicon...
- Patent number 7,678,516
- Issue date Mar 16, 2010
- KLA-Tencor Technologies Corp.
- Kevin Monahan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for optically monitoring the fidelity of patt...
- Patent number 7,557,921
- Issue date Jul 7, 2009
- KLA-Tencor Technologies Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron beam dose control for scanning electron microscopy and cri...
- Patent number 6,211,518
- Issue date Apr 3, 2001
- KLA-Tencor Corporation
- Neil Richardson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam dose control for scanning electron microscopy and cri...
- Patent number 5,869,833
- Issue date Feb 9, 1999
- KLA-Tencor Corporation
- Neil Richardson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Test structures and methods for monitoring or controlling a semicon...
- Publication number 20060024850
- Publication date Feb 2, 2006
- Kevin Monahan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kevin Monahan

Person

Patents Grantslast 30 patents

Secure intra-chip hardware micro-segmentation using charged particl...

Precision substrate material multi-processing using miniature-colum...

Precision substrate material multi-processing using miniature-colum...

Precision substrate material multi-processing using miniature-colum...

Secure permanent integrated circuit personalization

Patterned atomic layer etching and deposition using miniature-colum...

Secure intra-chip hardware micro-segmentation using charged particl...

Secure permanent integrated circuit personalization

Alignment and registration targets for charged particle beam substr...

Alignment and registration targets for charged particle beam substr...

Patterned atomic layer etching and deposition using miniature-colum...

Precision substrate material multi-processing using miniature-colum...

Precision material modification using miniature-column charged part...

Precision material modification using miniature-column charged part...

Precision substrate material removal using miniature-column charged...

Charged particle beam substrate inspection using both vector and ra...

Alignment and registration targets for multiple-column charged part...

Precision deposition using miniature-column charged particle beam a...

Alignment and registration targets for multiple-column charged part...

Charged particle beam substrate inspection using both vector and ra...

Precision substrate material removal using miniature-column charged...

Precision deposition using miniature-column charged particle beam a...

Automatic optimization of etch process for accelerated yield ramp w...

Matched multiple charged particle beam systems for lithographic pat...

Matched multiple charged particle beam systems for lithographic pat...

Automatic optimization of etch process for accelerated yield ramp w...

Test structures and methods for monitoring or controlling a semicon...

Apparatus and methods for optically monitoring the fidelity of patt...

Electron beam dose control for scanning electron microscopy and cri...

Electron beam dose control for scanning electron microscopy and cri...

Patents Applicationslast 30 patents

Test structures and methods for monitoring or controlling a semicon...