Kevin O'Brien

Person

Menlo Park, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for measuring radiation and temperature exposure...
- Patent number 10,215,626
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Mei Sun
- G01 - MEASURING TESTING
Information Patent Grant
Wafer level spectrometer
- Patent number 9,964,440
- Issue date May 8, 2018
- KLA-Tencor Corporation
- Earl M. Jensen
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for measuring radiation and temperature exposure...
- Patent number 9,823,121
- Issue date Nov 21, 2017
- KLA-Tencor Corporation
- Mei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Position sensitive substrate device
- Patent number 9,620,400
- Issue date Apr 11, 2017
- KLA-Tencor Corporation
- Earl Jensen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film thickness monitor
- Patent number 9,360,302
- Issue date Jun 7, 2016
- KLA-Tencor Corporation
- Earl Jensen
- G01 - MEASURING TESTING
Information Patent Grant
Thickness change monitor wafer for in situ film thickness monitoring
- Patent number 9,305,753
- Issue date Apr 5, 2016
- KLA-Tencor Corporation
- Earl Jensen
- G01 - MEASURING TESTING
Information Patent Grant
Wafer level spectrometer
- Patent number 9,140,604
- Issue date Sep 22, 2015
- KLA-Tencor Corporation
- Earl Jensen
- G01 - MEASURING TESTING
Information Patent Grant
Optical diffraction gratings and methods for manufacturing same
- Patent number 8,792,169
- Issue date Jul 29, 2014
- Arizona Board of Regents on behalf of Arizona State University
- Hanqing Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Sample Transport Device With Integrated Metrology
- Publication number 20190295874
- Publication date Sep 26, 2019
- KLA-Tencor Corporation
- Giampietro Bieli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Measuring Radiation and Temperature Exposure...
- Publication number 20180052045
- Publication date Feb 22, 2018
- KLA-Tencor Corporation
- Mei Sun
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Measuring Radiation and Temperature Exposure...
- Publication number 20160138969
- Publication date May 19, 2016
- KLA-Tencor Corporation
- Mei Sun
- G01 - MEASURING TESTING
Information Patent Application
WAFER LEVEL SPECTROMETER
- Publication number 20160011046
- Publication date Jan 14, 2016
- KLA Tencor
- Earl M. Jensen
- G01 - MEASURING TESTING
Information Patent Application
POSITION SENSITIVE SUBSTRATE DEVICE
- Publication number 20150176980
- Publication date Jun 25, 2015
- KLA-Tencor Corporation
- Earl Jensen
- G01 - MEASURING TESTING
Information Patent Application
THICKNESS CHANGE MONITOR WAFER FOR IN SITU FILM THICKNESS MONITORING
- Publication number 20140253928
- Publication date Sep 11, 2014
- KLA-Tencor Corporation
- Earl Jensen
- G01 - MEASURING TESTING
Information Patent Application
FILM THICKNESS MONITOR
- Publication number 20130155390
- Publication date Jun 20, 2013
- Earl Jensen
- G01 - MEASURING TESTING
Information Patent Application
WAFER LEVEL SPECTROMETER
- Publication number 20120318966
- Publication date Dec 20, 2012
- KLA-Tencor Corporation
- Earl Jensen
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL DIFFRACTION GRATINGS AND METHODS FOR MANUFACTURING SAME
- Publication number 20120212820
- Publication date Aug 23, 2012
- Hanqing Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kevin O'Brien

Person

Patents Grantslast 30 patents

Method and system for measuring radiation and temperature exposure...

Wafer level spectrometer

Method and system for measuring radiation and temperature exposure...

Position sensitive substrate device

Film thickness monitor

Thickness change monitor wafer for in situ film thickness monitoring

Wafer level spectrometer

Optical diffraction gratings and methods for manufacturing same

Patents Applicationslast 30 patents

Sample Transport Device With Integrated Metrology

Method and System for Measuring Radiation and Temperature Exposure...

Method and System for Measuring Radiation and Temperature Exposure...

WAFER LEVEL SPECTROMETER

POSITION SENSITIVE SUBSTRATE DEVICE

THICKNESS CHANGE MONITOR WAFER FOR IN SITU FILM THICKNESS MONITORING

FILM THICKNESS MONITOR

WAFER LEVEL SPECTROMETER

OPTICAL DIFFRACTION GRATINGS AND METHODS FOR MANUFACTURING SAME