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Kevin T. Crofton
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Platen assembly having a topographically altered platen surface
Patent number
6,712,679
Issue date
Mar 30, 2004
Lam Research Corporation
Travis R. Taylor
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
Platen assembly having a topographically altered platen surface
Publication number
20030032379
Publication date
Feb 13, 2003
Lam Research Corportion
Travis R. Taylor
B24 - GRINDING POLISHING