Kevin W. Coyle

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Kalispell, MT, US

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Patents Grantslast 30 patents

Information Patent Grant
Modular semiconductor workpiece processing tool
- Patent number 7,074,246
- Issue date Jul 11, 2006
- Semitool, Inc.
- Robert W. Berner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus having linear conveyer system
- Patent number 6,672,820
- Issue date Jan 6, 2004
- Semitool, Inc.
- Kyle Hanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular semiconductor workpiece processing tool
- Patent number 6,440,178
- Issue date Aug 27, 2002
- Semitool, Inc.
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Modular semiconductor workpiece processing tool
- Patent number 6,203,582
- Issue date Mar 20, 2001
- Semitool, Inc.
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Cathode current control system for a wafer electroplating apparatus
- Patent number 6,139,703
- Issue date Oct 31, 2000
- Semitool, Inc.
- Kyle M. Hanson
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Cathode current control system for a wafer electroplating apparatus
- Patent number 6,004,440
- Issue date Dec 21, 1999
- Semitool, Inc.
- Kyle M. Hanson
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
Modular semiconductor workpiece processing tool
- Publication number 20050193537
- Publication date Sep 8, 2005
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Modular semiconductor workpiece processing tool
- Publication number 20020194716
- Publication date Dec 26, 2002
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Modular semiconductor workpiece processing tool
- Publication number 20010030101
- Publication date Oct 18, 2001
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR