Kevin W. Wenzel

Person

Belmont, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for deposition cleaning in a pumping line
- Patent number 11,367,598
- Issue date Jun 21, 2022
- MKS Instruments, Inc.
- Gordon Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for deposition cleaning in a pumping line
- Patent number 11,024,489
- Issue date Jun 1, 2021
- MKS Instruments, Inc.
- Gordon Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing dielectric materials using micr...
- Patent number 10,940,635
- Issue date Mar 9, 2021
- MKS Instruments, Inc.
- Xing Chen
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Apparatus and method for ignition of a plasma system and for monito...
- Patent number 10,910,798
- Issue date Feb 2, 2021
- MKS Instruments, Inc.
- Atul Gupta
- B08 - CLEANING
Information Patent Grant
Method and apparatus for deposition cleaning in a pumping line
- Patent number 10,535,506
- Issue date Jan 14, 2020
- MKS Instruments, Inc.
- Gordon Hill
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Apparatus and method for ignition of a plasma system and for monito...
- Patent number 10,505,348
- Issue date Dec 10, 2019
- MKS Instruments, Inc.
- Atul Gupta
- B08 - CLEANING
Information Patent Grant
Method and apparatus for processing dielectric materials using micr...
- Patent number 10,071,521
- Issue date Sep 11, 2018
- MKS Instruments, Inc.
- Xing Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Toroidal plasma abatement apparatus and method
- Patent number 9,991,098
- Issue date Jun 5, 2018
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma applicator with improved power uniformity
- Patent number 9,653,266
- Issue date May 16, 2017
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal plasma abatement apparatus and method
- Patent number 9,630,142
- Issue date Apr 25, 2017
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for ion beam profiling
- Patent number 7,064,340
- Issue date Jun 20, 2006
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam scanning systems and methods for improved ion implantation...
- Patent number 6,903,350
- Issue date Jun 7, 2005
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for ion beam containment using photoelectrons in...
- Patent number 6,891,174
- Issue date May 10, 2005
- Axcelis Technologies, Inc.
- Kevin W. Wenzel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Time of flight energy measurement apparatus for an ion beam implanter
- Patent number 6,137,112
- Issue date Oct 24, 2000
- Eaton Corporation
- Edward K. McIntyre
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus for Deposition Cleaning in a Pumping Line
- Publication number 20210082672
- Publication date Mar 18, 2021
- MKS Instruments, Inc.
- Gordon Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE APPLICATOR WITH SOLID-STATE GENERATOR POWER SOURCE
- Publication number 20210005430
- Publication date Jan 7, 2021
- MKS Instruments, Inc.
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITO...
- Publication number 20200099199
- Publication date Mar 26, 2020
- MKS Instruments, Inc.
- Atul Gupta
- B08 - CLEANING
Information Patent Application
Method and Apparatus for Deposition Cleaning in a Pumping Line
- Publication number 20200075298
- Publication date Mar 5, 2020
- MKS Instruments, Inc.
- Gordon Hill
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITO...
- Publication number 20190089135
- Publication date Mar 21, 2019
- MKS Instruments, Inc.
- Atul Gupta
- B08 - CLEANING
Information Patent Application
Method and Apparatus for Processing Dielectric Materials Using Micr...
- Publication number 20180345569
- Publication date Dec 6, 2018
- MKS Instruments, Inc.
- Xing Chen
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MICROWAVE APPLICATOR WITH SOLID-STATE GENERATOR POWER SOURCE
- Publication number 20180269037
- Publication date Sep 20, 2018
- MKS Instruments, Inc.
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
- Publication number 20180233333
- Publication date Aug 16, 2018
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTIVE OXIDE COATING WITH REDUCED METAL CONCENTRATIONS
- Publication number 20180195196
- Publication date Jul 12, 2018
- MKS Instruments, Inc.
- Chiu-Ying Tai
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
- Publication number 20170213704
- Publication date Jul 27, 2017
- MKS Instruments, Inc.
- Xing Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Method and Apparatus for Deposition Cleaning in a Pumping Line
- Publication number 20170200591
- Publication date Jul 13, 2017
- MKS Instruments, Inc.
- Gordon Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Processing Dielectric Materials Using Micr...
- Publication number 20170173846
- Publication date Jun 22, 2017
- MKS Instruments, Inc.
- Xing Chen
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MICROWAVE PLASMA APPLICATOR WITH IMPROVED POWER UNIFORMITY
- Publication number 20150318148
- Publication date Nov 5, 2015
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA APPLICATOR WITH IMPROVED POWER UNIFORMITY
- Publication number 20150279626
- Publication date Oct 1, 2015
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal plasma Abatement Apparatus and Method
- Publication number 20140262746
- Publication date Sep 18, 2014
- MKS Instruments, Inc.
- Xing Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS INJECTOR APPARATUS FOR PLASMA APPLICATOR
- Publication number 20130146225
- Publication date Jun 13, 2013
- MKS Instruments, Inc.
- Xing Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR ION BEAM PROFILING
- Publication number 20060124867
- Publication date Jun 15, 2006
- Volvo Trucks North America, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnet for scanning ion beams
- Publication number 20060017010
- Publication date Jan 26, 2006
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD AND SYSTEM FOR ION BEAM CONTAINMENT USING PHOTOELECTRONS IN...
- Publication number 20050023487
- Publication date Feb 3, 2005
- Kevin W. Wenzel
- H01 - BASIC ELECTRIC ELEMENTS

Kevin W. Wenzel

Person

Patents Grantslast 30 patents

Method and apparatus for deposition cleaning in a pumping line

Method and apparatus for deposition cleaning in a pumping line

Method and apparatus for processing dielectric materials using micr...

Apparatus and method for ignition of a plasma system and for monito...

Method and apparatus for deposition cleaning in a pumping line

Apparatus and method for ignition of a plasma system and for monito...

Method and apparatus for processing dielectric materials using micr...

Toroidal plasma abatement apparatus and method

Microwave plasma applicator with improved power uniformity

Toroidal plasma abatement apparatus and method

Method and apparatus for ion beam profiling

Ion beam scanning systems and methods for improved ion implantation...

Method and system for ion beam containment using photoelectrons in...

Time of flight energy measurement apparatus for an ion beam implanter

Patents Applicationslast 30 patents

Method and Apparatus for Deposition Cleaning in a Pumping Line

MICROWAVE APPLICATOR WITH SOLID-STATE GENERATOR POWER SOURCE

APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITO...

Method and Apparatus for Deposition Cleaning in a Pumping Line

APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITO...

Method and Apparatus for Processing Dielectric Materials Using Micr...

MICROWAVE APPLICATOR WITH SOLID-STATE GENERATOR POWER SOURCE

TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD

PROTECTIVE OXIDE COATING WITH REDUCED METAL CONCENTRATIONS

TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD

Method and Apparatus for Deposition Cleaning in a Pumping Line

Method and Apparatus for Processing Dielectric Materials Using Micr...

MICROWAVE PLASMA APPLICATOR WITH IMPROVED POWER UNIFORMITY

MICROWAVE PLASMA APPLICATOR WITH IMPROVED POWER UNIFORMITY

Toroidal plasma Abatement Apparatus and Method

GAS INJECTOR APPARATUS FOR PLASMA APPLICATOR

METHOD AND APPARATUS FOR ION BEAM PROFILING

Magnet for scanning ion beams

METHOD AND SYSTEM FOR ION BEAM CONTAINMENT USING PHOTOELECTRONS IN...