Kevin Yu

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Closed loop concentration control system for chemical mechanical po...
- Patent number 6,721,628
- Issue date Apr 13, 2004
- United Microelectronics Corp.
- Chien-Hsin Lai
- B24 - GRINDING POLISHING
Information Patent Grant
Pressure monitoring system for chemical-mechanical polishing
- Patent number 6,682,399
- Issue date Jan 27, 2004
- United Microelectronics Corp.
- Chien-Hsin Lai
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing apparatus
- Patent number 6,341,995
- Issue date Jan 29, 2002
- United Microelectronics Corp.
- Chien-Hsin Lai
- B24 - GRINDING POLISHING