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KEVIN YU
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SAN JOSE, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Method of anisotropic etching of substrates
Patent number
6,383,938
Issue date
May 7, 2002
Alcatel
Tamarak Pandhumsoporn
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD OF ANISOTROPIC ETCHING OF SUBSTRATES
Publication number
20010044213
Publication date
Nov 22, 2001
TAMARAK PANDHUMSOPORN
H01 - BASIC ELECTRIC ELEMENTS