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Khalid Manssouri
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Eindhoven, NL
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last 30 patents
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Patent Grant
Lithographic apparatus, substrate support system, device manufactur...
Patent number
9,715,182
Issue date
Jul 25, 2017
ASML Netherlands B.V.
Marinus Maria Johannes Van De Wal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Servo control system, lithographic apparatus and control method
Patent number
8,830,442
Issue date
Sep 9, 2014
AMSL Netherlands B.V.
Youssef Karel Maria De Vos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE SUPPORT SYSTEM, DEVICE MANUFACTUR...
Publication number
20150316860
Publication date
Nov 5, 2015
ASML NETHERLANDS B.V.
Marinus Maria Johannes VAN DE WAL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Servo Control System, Lithographic Apparatus and Control Method
Publication number
20090147236
Publication date
Jun 11, 2009
ASML NETHERLANDS B.V.
Youssef Karel Maria De Vos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY