Khoon Peng Lim

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Real time monitoring of CMP pad conditioning process
- Patent number 7,163,435
- Issue date Jan 16, 2007
- TECH Semiconductor Singapore Pte Ltd.
- Khoon Peng Lim
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
REAL TIME MONITORING OF CMP PAD CONDITIONING PROCESS
- Publication number 20060172662
- Publication date Aug 3, 2006
- TECH Semiconductor Singapore Pte. Ltd.
- Khoon Peng Lim
- B24 - GRINDING POLISHING