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Khurshid Ahmed
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San Diego, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Gas discharge laser light source beam delivery unit
Patent number
7,190,707
Issue date
Mar 13, 2007
Cymer, Inc.
Palash P. Das
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser spectral engineering for lithographic process
Patent number
7,139,301
Issue date
Nov 21, 2006
Cymer, Inc.
Armen Kroyan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser spectral engineering for lithographic process
Patent number
6,671,294
Issue date
Dec 30, 2003
Cymer, Inc.
Armen Kroyan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Gas discharge laser light source beam delivery unit
Publication number
20070160103
Publication date
Jul 12, 2007
Cymer, Inc.
Palash P. Das
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Gas discharge laser light source beam delivery unit
Publication number
20040179560
Publication date
Sep 16, 2004
Palash P. Das
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser spectral engineering for lithographic process
Publication number
20040146082
Publication date
Jul 29, 2004
Armen Kroyan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Laser spectral engineering for lithographic process
Publication number
20020048288
Publication date
Apr 25, 2002
Armen Kroyan
H01 - BASIC ELECTRIC ELEMENTS