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Ki-Yeon Chu
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Gyeonggi-do, KR
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last 30 patents
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Patent Grant
Polishing head and polishing carrier apparatus having the same
Patent number
9,999,957
Issue date
Jun 19, 2018
Samsung Electronics Co., Ltd.
Yun-Seok Choi
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
POLISHING HEAD AND POLISHING CARRIER APPARATUS HAVING THE SAME
Publication number
20160236318
Publication date
Aug 18, 2016
Samsung Electronics Co., Ltd.
Yun-Seok CHOI
B24 - GRINDING POLISHING
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Patent Application
Wet cleaning apparatus including a cover for removing impurities th...
Publication number
20050279389
Publication date
Dec 22, 2005
Yong-Myung Jun
B08 - CLEANING