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KiChul Um

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  • Osan-si, KR
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 12,183,546
    • Issue date Dec 31, 2024
    • ASM IP Holding B.V.
    • KiChul Um
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate support unit, thin film deposition apparatus including th...
    • Patent number 11,414,760
    • Issue date Aug 16, 2022
    • ASM IP Holding B.V.
    • KiChul Um
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thin film deposition method
    • Patent number 11,274,369
    • Issue date Mar 15, 2022
    • ASM IP Holding B.V.
    • KiChul Um
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents