Kie Jin Park

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for forming a cobalt-ruthenium liner layer for interconnect...
- Patent number 9,677,172
- Issue date Jun 13, 2017
- Applied Materials, Inc.
- Tae Hong Ha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming metal organic tungsten for middle of the line (...
- Patent number 9,653,352
- Issue date May 16, 2017
- Applied Materials, Inc.
- Liqi Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Boron ionization for aluminum oxide etch enhancement
- Patent number 9,051,655
- Issue date Jun 9, 2015
- Applied Materials, Inc.
- Kai Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of improving film non-uniformity and throughput
- Patent number 8,906,791
- Issue date Dec 9, 2014
- Novellus Systems, Inc.
- Kie-Jin Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion-induced atomic layer deposition of tantalum
- Patent number 8,747,964
- Issue date Jun 10, 2014
- Novellus Systems, Inc.
- Kie Jin Park
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR FORMING METAL ORGANIC TUNGSTEN FOR MIDDLE OF THE LINE (...
- Publication number 20150294906
- Publication date Oct 15, 2015
- LIQI WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING A COBALT-RUTHENIUM LINER LAYER FOR INTERCONNECT...
- Publication number 20150203961
- Publication date Jul 23, 2015
- Applied Materials, Inc.
- TAE HONG HA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON IONIZATION FOR ALUMINUM OXIDE ETCH ENHANCEMENT
- Publication number 20150076110
- Publication date Mar 19, 2015
- Applied Materials, Inc.
- Kai WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CREATION OF MAGNETIC FIELD (VECTOR POTENTIAL) WELL FOR IMPROVED PLA...
- Publication number 20120228125
- Publication date Sep 13, 2012
- Liqi Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION-INDUCED ATOMIC LAYER DEPOSITION OF TANTALUM
- Publication number 20120115325
- Publication date May 10, 2012
- Kie Jin PARK
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF MITIGATING SUBSTRATE DAMAGE DURING DEPOSITION PROCESSES
- Publication number 20120083134
- Publication date Apr 5, 2012
- Hui-Jung WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CREATION OF MAGNETIC FIELD (VECTOR POTENTIAL) WELL FOR IMPROVED PLA...
- Publication number 20120070589
- Publication date Mar 22, 2012
- Liqi Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF IMPROVING FILM NON-UNIFORMITY AND THROUGHPUT
- Publication number 20110300716
- Publication date Dec 8, 2011
- Kie-Jin PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kie Jin Park

Person

Patents Grantslast 30 patents

Methods for forming a cobalt-ruthenium liner layer for interconnect...

Methods for forming metal organic tungsten for middle of the line (...

Boron ionization for aluminum oxide etch enhancement

Method of improving film non-uniformity and throughput

Ion-induced atomic layer deposition of tantalum

Patents Applicationslast 30 patents

METHODS FOR FORMING METAL ORGANIC TUNGSTEN FOR MIDDLE OF THE LINE (...

METHODS FOR FORMING A COBALT-RUTHENIUM LINER LAYER FOR INTERCONNECT...

BORON IONIZATION FOR ALUMINUM OXIDE ETCH ENHANCEMENT

CREATION OF MAGNETIC FIELD (VECTOR POTENTIAL) WELL FOR IMPROVED PLA...

ION-INDUCED ATOMIC LAYER DEPOSITION OF TANTALUM

METHOD OF MITIGATING SUBSTRATE DAMAGE DURING DEPOSITION PROCESSES

CREATION OF MAGNETIC FIELD (VECTOR POTENTIAL) WELL FOR IMPROVED PLA...

METHOD OF IMPROVING FILM NON-UNIFORMITY AND THROUGHPUT