Kiet A. Chau

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North Reading, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for forming substrate surfaces with exposed cr...
- Patent number 11,735,432
- Issue date Aug 22, 2023
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced high aspect ratio etch performance using accelerated neutr...
- Patent number 10,670,960
- Issue date Jun 2, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR FORMING SUBSTRATE SURFACES WITH EXPOSED CR...
- Publication number 20210225661
- Publication date Jul 22, 2021
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED HIGH ASPECT RATIO ETCH PERFORMANCE USING ACCELERATED NEUTR...
- Publication number 20180292745
- Publication date Oct 11, 2018
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING