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Dry etching method
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Patent number 5,643,473
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Issue date Jul 1, 1997
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Hitachi, Ltd.
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Shinichi Tachi
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H01 - BASIC ELECTRIC ELEMENTS
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Dry etching method
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Patent number 5,147,500
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Issue date Sep 15, 1992
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Hitachi, Ltd.
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Shinichi Tachi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Dry etching apparatus
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Patent number 4,956,043
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Issue date Sep 11, 1990
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Hitachi, Ltd.
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Masafumi Kanetomo
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H01 - BASIC ELECTRIC ELEMENTS
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Etching method
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Patent number 4,943,344
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Issue date Jul 24, 1990
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Hitachi, Ltd.
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Shinichi Tachi
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device
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Patent number 4,891,684
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Issue date Jan 2, 1990
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Hitachi, Ltd.
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Yasushiro Nishioka
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H01 - BASIC ELECTRIC ELEMENTS
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Process for surface treatment
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Patent number 4,857,137
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Issue date Aug 15, 1989
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Hitachi, Ltd.
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Shinichi Tachi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor device
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Patent number 4,636,833
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Issue date Jan 13, 1987
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Hitachi, Ltd.
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Yasushiro Nishioka
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H01 - BASIC ELECTRIC ELEMENTS
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Thin film deposition
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Patent number 4,599,135
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Issue date Jul 8, 1986
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Hitachi, Ltd.
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Sukeyoshi Tsunekawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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