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last 30 patents
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Patent Grant
Method of forming a microscopic pattern with far UV pattern exposur...
Patent number
4,614,706
Issue date
Sep 30, 1986
Hitachi, Ltd.
Toshiharu Matsuzawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming a microscopic pattern
Patent number
4,536,421
Issue date
Aug 20, 1985
Hitachi, Ltd.
Toshiharu Matsuzawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY