Kim Dong-Hun

Follow

Person

Yongin-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,591,224
- Issue date Nov 26, 2013
- Tokyo Electron Limited
- Kim Dong-Hun
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Utility apparatus and utility method of substrate processing apparatus
- Patent number 7,758,341
- Issue date Jul 20, 2010
- SNF Solutions, Co., Ltd.
- Kim Dong-Hun
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,503,762
- Issue date Mar 17, 2009
- SNF Solution Co., Ltd.
- Kim Dong-Hun
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20080096149
- Publication date Apr 24, 2008
- SNF SOLUTION, CO., LTD.
- Kim Dong-Hun
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Utility apparatus and utility method of substrate processing apparatus
- Publication number 20080078327
- Publication date Apr 3, 2008
- SNF SOLUTION, CO., LTD.
- Kim Dong-Hun
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Utility apparatus and utility method of substrate processing apparatus
- Publication number 20080078526
- Publication date Apr 3, 2008
- SNF SOLUTION, CO., LTD.
- Kim Dong-Hun
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...