Kimihiro Fukasawa

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Temperature control method, control apparatus, and plasma processin...
- Patent number 10,254,774
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Tatsuya Miura
- G05 - CONTROLLING REGULATING
Information Patent Grant
Plasma processing apparatus, plasma processing method, and storage...
- Patent number 9,299,540
- Issue date Mar 29, 2016
- Tokyo Electron Limited
- Tatsuya Ogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and gas supply method therefor
- Patent number 9,236,230
- Issue date Jan 12, 2016
- Tokyo Electron Limited
- Yoshiyuki Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus, plasma processing method, and storage...
- Patent number 8,864,934
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Tatsuya Ogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for processing a substrate and program therefor
- Patent number 7,409,253
- Issue date Aug 5, 2008
- Tokyo Electron Limited
- Noriaki Shimizu
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF TRANSFERRING WORKPIECE
- Publication number 20190304824
- Publication date Oct 3, 2019
- TOKYO ELECTRON LIMITED
- Takayuki SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...
- Publication number 20150001181
- Publication date Jan 1, 2015
- TOKYO ELECTRON LIMITED
- Tatsuya Ogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD, CONTROL APPARATUS, AND PLASMA PROCESSIN...
- Publication number 20140288726
- Publication date Sep 25, 2014
- Tatsuya Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND GAS SUPPLY METHOD THEREFOR
- Publication number 20120305188
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Yoshiyuki KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...
- Publication number 20120248067
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Tatsuya Ogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for processing a substrate and program therefor
- Publication number 20060149403
- Publication date Jul 6, 2006
- TOKYO ELECTRON LIMITED
- Noriaki Shimizu
- G05 - CONTROLLING REGULATING