Kimihiro Okada

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Taito-ku, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film-depositing target and preparation of phase shift mask blank
- Patent number 7,598,004
- Issue date Oct 6, 2009
- Shin-Etsu Chemical Co., Ltd.
- Hiroki Yoshikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Halftone phase shift mask blank, halftone phase shift mask, and pat...
- Patent number 7,556,892
- Issue date Jul 7, 2009
- Shin-Etsu Chemical Co., Ltd.
- Kimihiro Okada
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
FILM-DEPOSITING TARGET AND PREPARATION OF PHASE SHIFT MASK BLANK
- Publication number 20090057143
- Publication date Mar 5, 2009
- Hiroki YOSHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Halftone phase shift mask blank, halftone phase shift mask, and pat...
- Publication number 20050244722
- Publication date Nov 3, 2005
- Shin-Etsu Chemical Co., Ltd.
- Kimihiro Okada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Film-depositing target and preparation of phase shift mask blank
- Publication number 20050217988
- Publication date Oct 6, 2005
- Shin-Etsu Chemical Co., Ltd.
- Hiroki Yoshikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...