Kiminari Sakaguchi

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Kumamoto-Ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate carrying mechanism, substrate carrying method and recordi...
- Patent number 8,781,787
- Issue date Jul 15, 2014
- Tokyo Electron Limited
- Tokutarou Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 6,730,620
- Issue date May 4, 2004
- Tokyo Electron Limited
- Kei Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 6,413,317
- Issue date Jul 2, 2002
- Tokyo Electron Limited
- Kei Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...
- Publication number 20240385582
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Kiminari SAKAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRYING MECHANISM, SUBSTRATE CARRYING METHOD AND RECORDI...
- Publication number 20120046904
- Publication date Feb 23, 2012
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20020119678
- Publication date Aug 29, 2002
- Kei Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming apparatus and coating film forming method
- Publication number 20020053321
- Publication date May 9, 2002
- TOKYO ELECTRON LIMITED
- Hiroshi Tomita
- H01 - BASIC ELECTRIC ELEMENTS