Kiminobu Akeno

Person

Minato-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Dust-collecting apparatus
- Patent number 11,266,999
- Issue date Mar 8, 2022
- NuFlare Technology, Inc.
- Yosuke Takahashi
- B08 - CLEANING
Information Patent Grant
Charged particle beam irradiation apparatus
- Patent number 11,049,688
- Issue date Jun 29, 2021
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Vibration control system and optical equipment equipped therewith
- Patent number 10,607,810
- Issue date Mar 31, 2020
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conductive contact point pin and charged particle beam apparatus
- Patent number 10,373,793
- Issue date Aug 6, 2019
- NUFLARE TECHNOLOGY, INC.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing apparatus and charged particle beam d...
- Patent number 8,987,683
- Issue date Mar 24, 2015
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 8,847,178
- Issue date Sep 30, 2014
- Nuflare Technology, Inc.
- Michihiro Kawaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cover and charged particle beam writing method using same
- Patent number 8,779,397
- Issue date Jul 15, 2014
- Nuflare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam processing apparatus
- Patent number 7,528,393
- Issue date May 5, 2009
- Kabushiki Kaisha Toshiba
- Kiminobu Akeno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment method
- Patent number 7,075,621
- Issue date Jul 11, 2006
- Kabushiki Kaisha Toshiba
- Soichiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment apparatus for substrates
- Patent number 6,901,314
- Issue date May 31, 2005
- Kabushiki Kaisha Toshiba
- Soichiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and chamber of charged particle beam s...
- Patent number 6,617,592
- Issue date Sep 9, 2003
- Kabushiki Kaisha Toshiba
- Jun Takamatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern evaluation apparatus and a method of pattern evaluation
- Patent number 5,602,645
- Issue date Feb 11, 1997
- Kabushiki Kaisha Toshiba
- Mitsuo Tabata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ROLLER RETAINER, ROLLER-RETAINER CONNECTED BODY, CROSS ROLLER GUIDE...
- Publication number 20240418211
- Publication date Dec 19, 2024
- NuFlare Technology, Inc.
- Yasutaka SATO
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...
- Publication number 20240234083
- Publication date Jul 11, 2024
- NuFlare Technology, Inc.
- Yasutaka SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...
- Publication number 20240136148
- Publication date Apr 25, 2024
- NuFlare Technology, Inc.
- Yasutaka SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM DETECTOR, MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS, A...
- Publication number 20240071714
- Publication date Feb 29, 2024
- NuFlare Technology, Inc.
- Yasutaka SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM IRRADIATION APPARATUS
- Publication number 20200105499
- Publication date Apr 2, 2020
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION CONTROL SYSTEM AND OPTICAL EQUIPMENT EQUIPPED THEREWITH
- Publication number 20190214224
- Publication date Jul 11, 2019
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUST-COLLECTING APPARATUS
- Publication number 20190126290
- Publication date May 2, 2019
- NuFlare Technology, Inc.
- Yosuke TAKAHASHI
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Application
Conductive Contact Point Pin and Charged Particle Beam Apparatus
- Publication number 20180068824
- Publication date Mar 8, 2018
- NUFLARE TECHNOLOGY, INC.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...
- Publication number 20140319373
- Publication date Oct 30, 2014
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20130082193
- Publication date Apr 4, 2013
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- B82 - NANO-TECHNOLOGY
Information Patent Application
SUBSTRATE COVER AND CHARGED PARTICLE BEAM WRITING METHOD USING SAME
- Publication number 20110155930
- Publication date Jun 30, 2011
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- B82 - NANO-TECHNOLOGY
Information Patent Application
Charged particle beam processing apparatus
- Publication number 20060076514
- Publication date Apr 13, 2006
- Kabushiki Kaisha Toshiba
- Kiminobu Akeno
- B82 - NANO-TECHNOLOGY
Information Patent Application
Alignment method
- Publication number 20050128451
- Publication date Jun 16, 2005
- Soichiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam system and chamber of charged particle beam s...
- Publication number 20010025931
- Publication date Oct 4, 2001
- Jun Takamatsu
- H01 - BASIC ELECTRIC ELEMENTS

Kiminobu Akeno

Person

Patents Grantslast 30 patents

Dust-collecting apparatus

Charged particle beam irradiation apparatus

Vibration control system and optical equipment equipped therewith

Conductive contact point pin and charged particle beam apparatus

Charged particle beam drawing apparatus and charged particle beam d...

Charged particle beam writing apparatus and charged particle beam w...

Substrate cover and charged particle beam writing method using same

Charged particle beam processing apparatus

Alignment method

Alignment apparatus for substrates

Charged particle beam system and chamber of charged particle beam s...

Pattern evaluation apparatus and a method of pattern evaluation

Patents Applicationslast 30 patents

ROLLER RETAINER, ROLLER-RETAINER CONNECTED BODY, CROSS ROLLER GUIDE...

BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...

BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...

BEAM DETECTOR, MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS, A...

CHARGED PARTICLE BEAM IRRADIATION APPARATUS

VIBRATION CONTROL SYSTEM AND OPTICAL EQUIPMENT EQUIPPED THEREWITH

DUST-COLLECTING APPARATUS

Conductive Contact Point Pin and Charged Particle Beam Apparatus

CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

SUBSTRATE COVER AND CHARGED PARTICLE BEAM WRITING METHOD USING SAME

Charged particle beam processing apparatus

Alignment method

Charged particle beam system and chamber of charged particle beam s...