Kimio Motoda

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,482,431
- Issue date Oct 25, 2022
- Tokyo Electron Limited
- Kimio Motoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bonding apparatus and bonding method
- Patent number 10,964,563
- Issue date Mar 30, 2021
- Tokyo Electron Limited
- Norio Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus and method for filling coating liquid
- Patent number 9,238,245
- Issue date Jan 19, 2016
- Tokyo Electron Limited
- Takayuki Ishii
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Floating-type substrate conveying and processing apparatus
- Patent number 7,905,195
- Issue date Mar 15, 2011
- Tokyo Electron Limited
- Tsuyoshi Yamasaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating method and apparatus for semiconductor process
- Patent number 6,749,688
- Issue date Jun 15, 2004
- Tokyo Electron Limited
- Kiyohisa Tateyama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating apparatus
- Patent number 6,514,343
- Issue date Feb 4, 2003
- Tokyo Electron Limited
- Kimio Motoda
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for cleaning treatment
- Patent number 6,398,879
- Issue date Jun 4, 2002
- Tokyo Electron Limited
- Fumio Satou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus
- Patent number 6,168,665
- Issue date Jan 2, 2001
- Tokyo Electron Limited
- Mitsuhiro Sakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning treatment
- Patent number 6,159,288
- Issue date Dec 12, 2000
- Tokyo Electron Limited
- Fumio Satou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Scrubbing apparatus and scrubbing method
- Patent number 6,058,544
- Issue date May 9, 2000
- Tokyo Electron Limited
- Kimio Motoda
- B08 - CLEANING
Information Patent Grant
Coating apparatus and method therefor
- Patent number 6,013,317
- Issue date Jan 11, 2000
- Tokyo Electron Limited
- Kimio Motoda
- B08 - CLEANING
Information Patent Grant
Apparatus for forming coating film for semiconductor processing
- Patent number 6,010,570
- Issue date Jan 4, 2000
- Tokyo Electron Limited
- Kimio Motoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating method and apparatus for semiconductor process
- Patent number 5,919,520
- Issue date Jul 6, 1999
- Tokyo Electron Limited
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for treating a substrate with resist and resist-treating...
- Patent number 5,906,860
- Issue date May 25, 1999
- Tokyo Electron Limited
- Kimio Motoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist processing method and apparatus
- Patent number 5,853,803
- Issue date Dec 29, 1998
- Tokyo Electron Limited
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for processing substrates
- Patent number 5,853,812
- Issue date Dec 29, 1998
- Tokyo Electron Limited
- Tetsu Kawasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming a coating film and coating apparatus
- Patent number 5,803,970
- Issue date Sep 8, 1998
- Tokyo Electron Limited
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating apparatus therefor
- Patent number 5,762,708
- Issue date Jun 9, 1998
- Tokyo Electron Limited
- Kimio Motoda
- B08 - CLEANING
Information Patent Grant
Resist processing apparatus for a rectangular substrate
- Patent number 5,718,763
- Issue date Feb 17, 1998
- Tokyo Electron Limited
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming a coating film
- Patent number 5,695,817
- Issue date Dec 9, 1997
- Tokyo Electron Limited
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for coating resist on substrate
- Patent number 5,688,322
- Issue date Nov 18, 1997
- Tokyo Electron Limited
- Kimio Motoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PLACING METHOD
- Publication number 20240282617
- Publication date Aug 22, 2024
- TOKYO ELECTRON LIMITED
- Kimio Motoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230014665
- Publication date Jan 19, 2023
- TOKYO ELECTRON LIMITED
- Kimio Motoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210035827
- Publication date Feb 4, 2021
- TOKYO ELECTRON LIMITED
- Kimio Motoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDING APPARATUS AND BONDING METHOD
- Publication number 20180323089
- Publication date Nov 8, 2018
- TOKYO ELECTRON LIMITED
- Norio Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING APPARATUS AND METHOD FOR FILLING COATING LIQUID
- Publication number 20140000518
- Publication date Jan 2, 2014
- Takayuki Ishii
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Floating-type substrate conveying and processing apparatus
- Publication number 20070017442
- Publication date Jan 25, 2007
- TOKYO ELECTRON LIMITED
- Tsuyoshi Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
- Publication number 20020110640
- Publication date Aug 15, 2002
- KIYOHISA TATEYAMA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Kimio Motoda

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Bonding apparatus and bonding method

Coating apparatus and method for filling coating liquid

Floating-type substrate conveying and processing apparatus

Coating method and apparatus for semiconductor process

Coating apparatus

Method and apparatus for cleaning treatment

Substrate processing apparatus

Method and apparatus for cleaning treatment

Scrubbing apparatus and scrubbing method

Coating apparatus and method therefor

Apparatus for forming coating film for semiconductor processing

Coating method and apparatus for semiconductor process

Apparatus for treating a substrate with resist and resist-treating...

Resist processing method and apparatus

Method and apparatus for processing substrates

Method of forming a coating film and coating apparatus

Coating apparatus therefor

Resist processing apparatus for a rectangular substrate

Method of forming a coating film

Apparatus for coating resist on substrate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PLACING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

BONDING APPARATUS AND BONDING METHOD

COATING APPARATUS AND METHOD FOR FILLING COATING LIQUID

Floating-type substrate conveying and processing apparatus

COATING METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS