Kimio Yanagida

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Fukushima, JP

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Patents Grantslast 30 patents

Information Patent Grant
Pattern writing system and pattern writing method
- Patent number 7,663,734
- Issue date Feb 16, 2010
- Tadahiro Ohmi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Electron beam exposure device and exposure method
- Publication number 20060252160
- Publication date Nov 9, 2006
- Tadahiro OHMI
- Tadahiro Ohmi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Pattern plotting device and pattern plotting method
- Publication number 20060147841
- Publication date Jul 6, 2006
- Tadahiro OHMI Ball Semiconductor Inc.
- Tadahiro Ohmi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask repeater and mask manufacturing method
- Publication number 20060104413
- Publication date May 18, 2006
- Tadahiro OHMI
- Tadahiro Ohmi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY