Kimitaka OZAWA

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Lithography apparatus, and article manufacturing method
- Patent number 8,916,840
- Issue date Dec 23, 2014
- Canon Kabushiki Kaisha
- Kimitaka Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing apparatus and article manufacturing m...
- Patent number 8,822,960
- Issue date Sep 2, 2014
- Canon Kabushiki Kaisha
- Kimitaka Ozawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam drawing apparatus and article manufacturing m...
- Patent number 8,384,051
- Issue date Feb 26, 2013
- Canon Kabushiki Kaisha
- Kimitaka Ozawa
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DRAWING DATA GENERATING METHOD, PROCESSING APPARATUS, STORAGE MEDIU...
- Publication number 20150044615
- Publication date Feb 12, 2015
- Canon Kabushiki Kaisha
- Kimitaka OZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTUR...
- Publication number 20140057212
- Publication date Feb 27, 2014
- Canon Kabushiki Kaisha
- Shinji OHISHI
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20130230806
- Publication date Sep 5, 2013
- Canon Kabushiki Kaisha
- Kimitaka OZAWA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING M...
- Publication number 20120228516
- Publication date Sep 13, 2012
- Canon Kabushiki Kaisha
- Kimitaka OZAWA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING M...
- Publication number 20120126138
- Publication date May 24, 2012
- Canon Kabushiki Kaisha
- Kimitaka OZAWA
- B82 - NANO-TECHNOLOGY