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Kimitoshi Satou
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Tokyo, JP
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last 30 patents
Information
Patent Grant
Element wafer and method for manufacturing the same
Patent number
8,304,899
Issue date
Nov 6, 2012
Mitsubishi Electric Corporation
Mika Okumura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrostatic-capacitance-type acceleration sensor
Patent number
7,533,570
Issue date
May 19, 2009
Mitsubishi Denki Kabushiki Kaisha
Yasuo Yamaguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Thin film accelerometer
Patent number
7,495,301
Issue date
Feb 24, 2009
Mitsubishi Denki Kabushiki Kaisha
Mika Okumura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
7,094,620
Issue date
Aug 22, 2006
Mitsubishi Denki Kabushiki Kaisha
Mika Okumura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor pressure sensor including multiple silicon substrates...
Patent number
5,335,550
Issue date
Aug 9, 1994
Mitsubishi Denki Kabushiki Kaisha
Kimitoshi Satou
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
ELEMENT WAFER AND METHOD FOR MANUFACTURING THE SAME
Publication number
20090230485
Publication date
Sep 17, 2009
MITSUBISHI ELECTRIC CORPORATION
Mika OKUMURA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROSTATIC-CAPACITANCE-TYPE ACCELERATION SENSOR
Publication number
20070062285
Publication date
Mar 22, 2007
Mitsubishi Denki Kabushiki Kaisha
Yasuo YAMAGUCHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THIN FILM STRUCTURE AND MANUFACTURING METHOD THEREFOR
Publication number
20070031638
Publication date
Feb 8, 2007
Mitsubishi Denki Kabushiki Kaisha
Mika OKUMURA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for fabricating semiconductor device and acceleration sensor
Publication number
20050227477
Publication date
Oct 13, 2005
Mitsubishi Denki Kabushiki Kaisha
Mika Okumura
B81 - MICRO-STRUCTURAL TECHNOLOGY