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Kimon Rybnicek
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Santa Barbara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
MEMS plate switch and method of manufacture
Patent number
7,864,006
Issue date
Jan 4, 2011
Innovative Micro Technology
John S. Foster
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for forming moveable features on a composite subs...
Patent number
7,785,913
Issue date
Aug 31, 2010
Innovative Micro Technology
John S. Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Interconnect structure using through wafer vias and method of fabri...
Patent number
7,675,162
Issue date
Mar 9, 2010
Innovative Micro Technology
John S. Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual substrate electrostatic MEMS switch with hermetic seal and met...
Patent number
7,528,691
Issue date
May 5, 2009
Innovative Micro Technology
Andrew D. Wallis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
MEMS device trench plating process and apparatus for through hole vias
Patent number
7,233,048
Issue date
Jun 19, 2007
Innovative Micro Technology
Kimon Rybnicek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical switch with low-inertia micromirror
Patent number
6,801,681
Issue date
Oct 5, 2004
Optical Coating Laboratory, Inc.
Patrick E. Feierabend
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
MEMS plate switch and method of manufacture
Publication number
20080277258
Publication date
Nov 13, 2008
Innovative Micro Technology
John S. Foster
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Interconnect structure using through wafer vias and method of fabri...
Publication number
20080079120
Publication date
Apr 3, 2008
Innovative Micro Technology
John S. Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Dual substrate electrostatic MEMS switch with hermetic seal and met...
Publication number
20070236313
Publication date
Oct 11, 2007
Innovative Micro Technology
Andrew D. Wallis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for forming moveable features on a composite subs...
Publication number
20070196998
Publication date
Aug 23, 2007
Innovative Micro Technology
John S. Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Trench plating process and apparatus for through hole vias
Publication number
20070045820
Publication date
Mar 1, 2007
Innovative Micro Technology
Kimon Rybnicek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Optical switch with low-inertia micromirror
Publication number
20020094152
Publication date
Jul 18, 2002
Patrick E. Feierabend
G02 - OPTICS