Kinya Ota

Person

Amagasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Top panel for microwave introduction window of a plasma processing...
- Patent number D594485
- Issue date Jun 16, 2009
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Top panel for microwave introduction window of a plasma processing...
- Patent number D593585
- Issue date Jun 2, 2009
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Cover for a heater stage of a plasma processing apparatus
- Patent number D583394
- Issue date Dec 23, 2008
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Top panel for microwave introduction window of a plasma processing...
- Patent number D572733
- Issue date Jul 8, 2008
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Top panel for microwave introduction window of a plasma processing...
- Patent number D571831
- Issue date Jun 24, 2008
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Top panel for microwave introduction window of a plasma processing...
- Patent number D571832
- Issue date Jun 24, 2008
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Top panel for microwave introduction window of plasma processing ap...
- Patent number D571833
- Issue date Jun 24, 2008
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Top panel for microwave introduction window of a plasma processing...
- Patent number D571383
- Issue date Jun 17, 2008
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND END POINT...
- Publication number 20110174776
- Publication date Jul 21, 2011
- TOKYO ELECTRON LIMITED
- Yoshiro Kabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS
- Publication number 20100307685
- Publication date Dec 9, 2010
- TOKYO ELECTRON LIMITED
- Kinya Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Top panel for microwave introduction window of a plasma processing...

Top panel for microwave introduction window of a plasma processing...

Cover for a heater stage of a plasma processing apparatus

Top panel for microwave introduction window of a plasma processing...

Top panel for microwave introduction window of a plasma processing...

Top panel for microwave introduction window of a plasma processing...

Top panel for microwave introduction window of plasma processing ap...

Top panel for microwave introduction window of a plasma processing...

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND END POINT...

MICROWAVE PLASMA PROCESSING APPARATUS