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Kinya Usuda
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Kanagawa, JP
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last 30 patents
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Patent Grant
Material supply system in semiconductor device manufacturing plant
Patent number
7,305,275
Issue date
Dec 4, 2007
Ebara Corporation
Kunihiro Miyazaki
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
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Patent Application
Material supply system in semiconductor device manufacturing plant
Publication number
20050177273
Publication date
Aug 11, 2005
EBARA CORPORATION
Kunihiro Miyazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...