TREA

Kippei Sugita

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  • Cambridge, MA, US
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Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20090294063
    • Publication date Dec 3, 2009
    • ULVAC INC.
    • Toshio HAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20020170678
    • Publication date Nov 21, 2002
    • Toshio Hayashi
    • H01 - BASIC ELECTRIC ELEMENTS